Spatial Behavior of the Plasma Potential in a Magnetized Radio-Frequency Discharge from Emissive Probe Data

Journal of the Physical Society of Japan ◽

10.1143/jpsj.76.094501 ◽

2007 ◽

Vol 76 (9) ◽

pp. 094501 ◽

Author(s):

Sebastian Popescu ◽

Yasunori Ohtsu ◽

Hiroharu Fujita

Keyword(s):

Radio Frequency ◽

Plasma Potential ◽

Spatial Behavior ◽

Radio Frequency Discharge ◽

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An emissive probe with a rhenium filament for measuring plasma potential in a radio frequency oxygen plasma

Review of Scientific Instruments ◽

10.1063/1.1469674 ◽

2002 ◽

Vol 73 (5) ◽

pp. 2033-2037 ◽

Author(s):

E. H. Wilson ◽

Jongtae Jeong ◽

N. Hershkowitz

Keyword(s):

Radio Frequency ◽

Oxygen Plasma ◽

Plasma Potential ◽

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Mapping of radio frequency plasma potential throughout a particle trapping region using an emissive probe

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.580159 ◽

1996 ◽

Vol 14 (2) ◽

pp. 639-643 ◽

Author(s):

Jungwon Kang ◽

Robert N. Carlile ◽

John F. O’Hanlon ◽

Sean M. Collins

Keyword(s):

Radio Frequency ◽

Plasma Potential ◽

Radio Frequency Plasma ◽

Particle Trapping ◽

Trapping Region ◽

Frequency Plasma ◽

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Radio frequency discharge with control of plasma potential distribution

Review of Scientific Instruments ◽

10.1063/1.3673489 ◽

2012 ◽

Vol 83 (2) ◽

pp. 02A720 ◽

Author(s):

Vadim Dudnikov ◽

A. Dudnikov

Keyword(s):

Radio Frequency ◽

Potential Distribution ◽

Plasma Potential ◽

Radio Frequency Discharge

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Measurements of time varying plasma potential, temperature, and density in a 13.56 MHz radio‐frequency discharge

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.575830 ◽

1989 ◽

Vol 7 (3) ◽

pp. 972-976 ◽

Author(s):

Jeffrey L. Wilson ◽

J. B. O. Caughman ◽

Phi Long Nguyen ◽

D. N. Ruzic

Keyword(s):

Radio Frequency ◽

Potential Temperature ◽

Plasma Potential ◽

Time Varying ◽

Radio Frequency Discharge

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RADIO FREQUENCY DISCHARGE PLASMA AND HELICON SOURCE FOR DIFFERENT APPLICATIONS

High Temperature Material Processes (An International Quarterly of High-Technology Plasma Processes) ◽

10.1615/hightempmatproc.2015015432 ◽

2014 ◽

Vol 18 (1-2) ◽

pp. 111-117

Author(s):

Victor V. Kuzenov ◽

Tatiana N. Polozova

Keyword(s):

Radio Frequency ◽

Discharge Plasma ◽

Helicon Source ◽

Radio Frequency Discharge

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Silane thermometry in radio‐frequency discharge plasma by coherent anti‐Stokes Raman spectroscopy

Journal of Applied Physics ◽

10.1063/1.336415 ◽

1986 ◽

Vol 59 (6) ◽

pp. 1872-1874 ◽

Author(s):

Nobuhiro Hata ◽

Akihisa Matsuda ◽

Kazunobu Tanaka

Keyword(s):

Raman Spectroscopy ◽

Radio Frequency ◽

Discharge Plasma ◽

Anti Stokes ◽

Radio Frequency Discharge

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Power dissipated in low‐pressure radio‐frequency discharge plasmas

Journal of Applied Physics ◽

10.1063/1.335395 ◽

1985 ◽

Vol 57 (1) ◽

pp. 53-58 ◽

Author(s):

O. A. Popov ◽

V. A. Godyak

Keyword(s):

Radio Frequency ◽

Low Pressure ◽

Discharge Plasmas ◽

Radio Frequency Discharge

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Experimental measurements in a radio-frequency discharge heated supersonic flow - Evaluation of a potential electric propulsion thruster

10.2514/6.1991-3615 ◽

1991 ◽

Author(s):

P. WANTUCK ◽

D. HULL

Keyword(s):

Supersonic Flow ◽

Radio Frequency ◽

Electric Propulsion ◽

Experimental Measurements ◽

Radio Frequency Discharge

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Effect of plasma‐surface interactions on the radial variation of H atom density in a hydrogen radio frequency discharge

Journal of Applied Physics ◽

10.1063/1.357722 ◽

1994 ◽

Vol 76 (3) ◽

pp. 1476-1479 ◽

Author(s):

B. N. Ganguly ◽

P. Bletzinger

Keyword(s):

Radio Frequency ◽

Surface Interactions ◽

Radial Variation ◽

Atom Density ◽

Plasma Surface ◽

Plasma Surface Interactions ◽

Radio Frequency Discharge

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Combined PIC–MCC approach for fast simulation of a radio frequency discharge at a low gas pressure

Plasma Sources Science and Technology ◽

10.1088/0963-0252/13/2/018 ◽

2004 ◽

Vol 13 (2) ◽

pp. 315-320 ◽

Author(s):

I V Schweigert ◽

V A Schweigert

Keyword(s):

Radio Frequency ◽

Gas Pressure ◽

Fast Simulation ◽

Radio Frequency Discharge

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