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2016 ◽  
Vol 75 (8) ◽  
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Author(s):  
J.-M. Hartmann ◽  
J. Aubin ◽  
S. Barraud ◽  
M.-P. Samson
Keyword(s):  
Epitaxial Growth ◽  
Atmospheric Pressure ◽  
Selective Epitaxial Growth

Characteristics of in-situ phosphorus-doped silicon selective epitaxial growth at atmospheric pressure

2008 ◽  
Vol 310 (21) ◽  
pp. 4507-4510 ◽  
Author(s):  
Tetsuya Ikuta ◽  
Shigeru Fujita ◽  
Hayato Iwamoto ◽  
Shingo Kadomura ◽  
Takayoshi Shimura ◽  
...  
Keyword(s):  
Epitaxial Growth ◽  
Atmospheric Pressure ◽  
Selective Epitaxial Growth ◽  
Doped Silicon ◽  
Phosphorus Doped

In situ arsenic-doped Si1−yCy selective epitaxial growth under atmospheric pressure

2008 ◽  
Vol 92 (4) ◽  
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Author(s):  
Tetsuya Ikuta ◽  
Shigeru Fujita ◽  
Hayato Iwamoto ◽  
Shingo Kadomura ◽  
Takayoshi Shimura ◽  
...  
Keyword(s):  
Epitaxial Growth ◽  
Atmospheric Pressure ◽  
Selective Epitaxial Growth

In Situ Doped Si Selective Epitaxial Growth at Low Temperatures by Atmospheric Pressure Plasma CVD

2019 ◽  
Vol 25 (8) ◽  
pp. 309-315 ◽  
Author(s):  
Takayuki Ohnishi ◽  
Yutaka Kirihata ◽  
Hiromasa Ohmi ◽  
Hiroaki Kakiuchi ◽  
Kiyoshi Yasutake
Keyword(s):  
Epitaxial Growth ◽  
Atmospheric Pressure ◽  
Low Temperatures ◽  
Atmospheric Pressure Plasma ◽  
Plasma Cvd ◽  
Selective Epitaxial Growth ◽  
Pressure Plasma

In situ B-doped Si epitaxial growth at low temperatures by atmospheric-pressure plasma CVD

2008 ◽  
Vol 40 (6-7) ◽  
pp. 984-987 ◽  
Author(s):  
Y. Kirihata ◽  
T. Nomura ◽  
H. Ohmi ◽  
H. Kakiuchi ◽  
K. Yasutake
Keyword(s):  
Epitaxial Growth ◽  
Atmospheric Pressure ◽  
Low Temperatures ◽  
Atmospheric Pressure Plasma ◽  
Plasma Cvd ◽  
Pressure Plasma

In-situ Doped Si Selective Epitaxial Growth for Raised Source/Drain Extension CMOSFET

2007 ◽  
Author(s):  
Tetsuya Ikuta ◽  
Yuki Miyanami ◽  
Shigeru Fujita ◽  
Hayato Iwamoto ◽  
Shingo Kadomura ◽  
...  
Keyword(s):  
Epitaxial Growth ◽  
Selective Epitaxial Growth
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