Effect of Surface Preparation on the Residual Oxide Thickness and Material Loss of InGaAs Layer
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1988 ◽
Vol 8
(3)
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pp. 159-166
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1995 ◽
Vol 48
(1-4)
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pp. 217-234
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1996 ◽
Vol 35
(12)
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pp. 1417-1422
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