Application of UV-Raman Spectroscopy for Characterization of the Physical Crystal Structure Following Flash Anneal of an Ultrashallow Implanted Layer
2006 ◽
Vol 153
(7)
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pp. G697
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2004 ◽
Vol 96
(1/2)
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pp. 1-4
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2015 ◽
Vol 113
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pp. 402-411
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Keyword(s):
2001 ◽
Vol 46
(1)
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pp. 23-34
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