Non-Vertical Sidewall Angle Influence on Triple-Gate FinFETs Corner Effects

2019 ◽  
Vol 6 (4) ◽  
pp. 381-386
Author(s):  
Renato Giacomini ◽  
Joao Antonio A. Martino
2018 ◽  
Vol 282 ◽  
pp. 161-167
Author(s):  
Derek W. Bassett

Analytical prediction of capillary pattern collapse is done by balancing the capillary forcesdue to the curved liquid interface with the elastic forces due to the bending of the structure. This paperintroduces a more realistic model where there is an array of repeating lines and spaces, and compares itto the traditional model of two single lines with liquid-filled space in between. This paper also includesthe influence of a non-vertical sidewall angle, and its effect on the overall elastic force. Results showthat the repeating structures and non-vertical sidewall angles both predict a higher critical height beforecollapse occurs compared to the traditional model.


2011 ◽  
Vol 21 (1) ◽  
pp. 65-78
Author(s):  
Tingyong Fang ◽  
Jufen Yu ◽  
Jun Chen ◽  
Yunshuai Zhang

2005 ◽  
Author(s):  
Justin J. Hwu ◽  
Homayoun Kiamanesh ◽  
Sukhbir Dulay ◽  
Peter Wilkens

Author(s):  
Kirsten Moselund ◽  
Didier Bouvet ◽  
Lucas Tschuor ◽  
Vincent Pott ◽  
Paolo Dainesi ◽  
...  
Keyword(s):  

PAMM ◽  
2005 ◽  
Vol 5 (1) ◽  
pp. 251-252
Author(s):  
Christian Mittelstedt ◽  
Wilfried Becker

2013 ◽  
Vol 52 (10R) ◽  
pp. 104302 ◽  
Author(s):  
Haijun Lou ◽  
Dan Li ◽  
Yan Dong ◽  
Xinnan Lin ◽  
Shengqi Yang ◽  
...  
Keyword(s):  

2018 ◽  
Vol 78 (3) ◽  
pp. 1577-1601 ◽  
Author(s):  
Doo Sung Choi ◽  
Johan Helsing ◽  
Mikyoung Lim

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