Investigation of Surface Blistering and Exfoliation in Germanium Induced by Hydrogen Molecular Ion Implantation

2019 ◽  
Vol 44 (1) ◽  
pp. 759-766
Author(s):  
Chi-Chen Chien ◽  
Der-Sheng Chao ◽  
Jenq-Horng Liang ◽  
Chih-Ming Lin
Keyword(s):  
Ion Implantation ◽  
Hydrogen Molecular Ion ◽  
Molecular Ion

Silicon Wafer Gettering Design for Advanced CMOS Image Sensors Using Hydrocarbon Molecular Ion Implantation: A review

2021 ◽  
Author(s):  
Kazunari Kurita ◽  
Takeshi Kadono ◽  
Ryosuke Okuyama ◽  
Ayumi Onaka-Masada ◽  
Satoshi Shigematsu ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Silicon Wafer ◽  
Image Sensors ◽  
Molecular Ion ◽  
Cmos Image Sensors

Improved Re-Crystallization of p[sup +] Poly-Si Gates with Molecular Ion Implantation

2008 ◽  
Author(s):  
Jin-Ku Lee ◽  
Min-Ae Ju ◽  
Jae-Geun Oh ◽  
Sun-Hwan Hwang ◽  
Seung-Joon Jeon ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Molecular Ion
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