Current Stage of the Investigation of the Composition of Oxygen Precipitates in Czochralski Silicon Wafers

2017 ◽  
Vol 6 (4) ◽  
pp. N17-N24 ◽  
Author(s):  
D. Kot ◽  
G. Kissinger ◽  
M. A. Schubert ◽  
A. Sattler
Keyword(s):  
Silicon Wafers ◽  
Czochralski Silicon ◽  
Oxygen Precipitates ◽  
Current Stage

Investigation of stoichiometry of oxygen precipitates in Czochralski silicon wafers by means of EDX, EELS and FTIR spectroscopy

2016 ◽  
Vol 99 ◽  
pp. 231-235 ◽  
Author(s):  
D. Kot ◽  
G. Kissinger ◽  
M.A. Schubert ◽  
M. Klingsporn ◽  
A. Huber ◽  
...  
Keyword(s):  
Ftir Spectroscopy ◽  
Silicon Wafers ◽  
Czochralski Silicon ◽  
Oxygen Precipitates

Composition of oxygen precipitates in Czochralski silicon wafers investigated by STEM with EDX/EELS and FTIR spectroscopy

2015 ◽  
Vol 9 (7) ◽  
pp. 405-409 ◽  
Author(s):  
Dawid Kot ◽  
Gudrun Kissinger ◽  
Markus Andreas Schubert ◽  
Max Klingsporn ◽  
Andreas Huber ◽  
...  
Keyword(s):  
Ftir Spectroscopy ◽  
Silicon Wafers ◽  
Czochralski Silicon ◽  
Oxygen Precipitates
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