Non-Contact and Non-Destructive Characterization of Laser Spike Annealed Si1-xGex/Si Using Very High Resolution Multiwavelength Raman Spectroscopy

2010 ◽  
Keyword(s):  
Raman Spectroscopy ◽  
High Resolution ◽  
Non Destructive ◽  
Non Destructive Characterization ◽  
Very High

Evaluation of Very High Resolution Multi-Wavelength Raman Spectroscopy for In-Line Characterization of Patterned Epitaxial Si1-xGex Layers on Si(100) Wafers

2019 ◽  
Vol 35 (2) ◽  
pp. 205-212 ◽  
Author(s):  
Victor Vartanian ◽  
Takeshi Ueda ◽  
Toshikazu Ishigaki ◽  
Kitaek Kang ◽  
Woo Sik Yoo
Keyword(s):  
Raman Spectroscopy ◽  
High Resolution ◽  
Multi Wavelength ◽  
Very High

Non-Contact and Non-Destructive Characterization of Shallow Implanted Silicon PN Junctions using Ultra-Violet Raman Spectroscopy

2011 ◽  
Author(s):  
Masashi Fukumoto ◽  
Noriyuki Hasuike ◽  
Hiroshi Harima ◽  
Masahiro Yoshimoto ◽  
Woo Sik Yoo ◽  
...  
Keyword(s):  
Raman Spectroscopy ◽  
Ultra Violet ◽  
Pn Junctions ◽  
Non Destructive ◽  
Non Destructive Characterization

Stress Characterization of Tungsten-Filled Through Silicon via Arrays Using Very High Resolution Multi-Wavelength Raman Spectroscopy

2019 ◽  
Vol 35 (2) ◽  
pp. 105-115 ◽  
Author(s):  
Jeff Gambino ◽  
Daniel Vanslette ◽  
Bucknell Webb ◽  
Cameron Luce ◽  
Takeshi Ueda ◽  
...  
Keyword(s):  
Raman Spectroscopy ◽  
High Resolution ◽  
Through Silicon Via ◽  
Multi Wavelength ◽  
Very High
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