scholarly journals High-Accuracy Surface Profile Measurement Based on the Vortex Phase-Shifting Interferometry

2021 ◽  
Vol 2021 ◽  
pp. 1-8
Author(s):  
Donge Zhao ◽  
Chaozheng Jia ◽  
Yayun Ma ◽  
Xuefeng Yang ◽  
Bin Zhang ◽  
...  
Keyword(s):  
Phase Modulation ◽  
Spatial Light Modulator ◽  
Surface Profile ◽  
Phase Shifting ◽  
Profile Measurement ◽  
Vortex Beam ◽  
Light Modulator ◽  
Vortex Phase ◽  
Phase Shifting Interferometry ◽  
Nonlinear Phase

According to the principle of phase-shifting interferometry and spiral phase characteristics of the vortex beam, this article proposes a method for detecting the surface profile of a transparent object, in which the +1 order vortex beam is generated by a spatial light modulator and is taken as the reference light. The influence of the nonlinear phase modulation characteristics of the spatial light modulator on the measurement precision is studied. The results show that nonlinear phase modulation has a great impact on the measurement. Then, the vortex lights with initial phases of 0, π/2, π, and 3π/2 are used to measure the H-type thin film sample based on the Twyman-Green interference system after correcting the nonlinear phase modulation characteristics. The experimental results show that the measurement error of the surface profile to an object with the theoretical value of 20 nm is 1.146 nm, and the feasibility of the optical vortex phase-shifting technique used to measure the surface profile of an object is verified.

Phase shifting interferometry using a spatial light modulator to measure optical thin films

2015 ◽  
Vol 54 (26) ◽  
pp. 7997 ◽  
Author(s):  
Brenda Villalobos-Mendoza ◽  
Fermín S. Granados-Agustín ◽  
Daniel Aguirre-Aguirre ◽  
Alejandro Cornejo-Rodríguez
Keyword(s):  
Thin Films ◽  
Spatial Light Modulator ◽  
Phase Shifting ◽  
Light Modulator ◽  
Phase Shifting Interferometry

Surface profile measurement of a highly reflective silicon wafer by phase-shifting interferometry

2015 ◽  
Vol 54 (13) ◽  
pp. 4207 ◽  
Author(s):  
Yangjin Kim ◽  
Kenichi Hibino ◽  
Naohiko Sugita ◽  
Mamoru Mitsuishi
Keyword(s):  
Silicon Wafer ◽  
Surface Profile ◽  
Phase Shifting ◽  
Profile Measurement ◽  
Phase Shifting Interferometry ◽  
Surface Profile Measurement

scholarly journals Phase Compensation of the Non-Uniformity of the Liquid Crystal on Silicon Spatial Light Modulator at Pixel Level

Sensors ◽  
2021 ◽  
Vol 21 (3) ◽  
pp. 967
Author(s):  
Zhen Zeng ◽  
Zexiao Li ◽  
Fengzhou Fang ◽  
Xiaodong Zhang
Keyword(s):  
Liquid Crystal ◽  
Phase Modulation ◽  
Spatial Light Modulator ◽  
Characteristic Curve ◽  
Physical Structure ◽  
Measuring System ◽  
Light Modulator ◽  
Phase Compensation ◽  
Modulation Characteristic ◽  
Liquid Crystal On Silicon

Phase compensation is a critical step for the optical measuring system using spatial light modulator (SLM). The wavefront distortion from SLM is mainly caused by the phase modulation non-linearity and non-uniformity of SLM’s physical structure and environmental conditions. A phase modulation characteristic calibration and compensation method for liquid crystal on silicon spatial light modulator (LCoS-SLM) with a Twyman-Green interferometer is illustrated in this study. A method using two sequences of phase maps is proposed to calibrate the non-uniformity character over the whole aperture of LCoS-SLM at pixel level. A phase compensation matrix is calculated to correct the actual phase modulation of the LCoS-SLM and ensure that the designed wavefront could be achieved. Compared with previously known compensation methods, the proposed method could obtain the phase modulation characteristic curve of each pixel on the LCoS-SLM, rather than a mono look-up table (LUT) curve or multi-LUT curves corresponding to an array of blocks over the whole aperture of the LCoS-SLM. The experiment results show that the phase compensation precision could reach a peak-valley value of 0.061λ in wavefront and this method can be applied in generating freeform wave front for precise optical performance.

Optical attenuator based on phase modulation of a spatial light modulator

2015 ◽  
Vol 13 (8) ◽  
pp. 082301-82304 ◽  
Author(s):  
Chao Liu Chao Liu ◽  
Di Wang Di Wang ◽  
Lixiao Yao Lixiao Yao ◽  
Lei Li Lei Li ◽  
Qionghua Wang Qionghua Wang
Keyword(s):  
Phase Modulation ◽  
Spatial Light Modulator ◽  
Light Modulator
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