N-Type Crystalline Silicon Films Free of Amorphous Silicon Deposited on Glass by HCl Addition Using Hot Wire Chemical Vapour Deposition

2011 ◽  
Vol 11 (9) ◽  
pp. 8242-8245 ◽  
Author(s):  
Yung-Bin Chung ◽  
Hyung-Ki Park ◽  
Sang-Hoon Lee ◽  
Jean-Ho Song ◽  
Nong-Moon Hwang
Keyword(s):  
Amorphous Silicon ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Crystalline Silicon ◽  
Chemical Vapour ◽  
Silicon Films ◽  
Hot Wire

Device-quality polycrystalline and amorphous silicon films by hot-wire chemical vapour deposition

1997 ◽  
Vol 76 (3) ◽  
pp. 309-321 ◽  
Author(s):  
R. E. I. Schropp ◽  
K. F. Feenstra ◽  
E. C. Molenbroek ◽  
H. Meiling ◽  
J. K. Rath
Keyword(s):  
Amorphous Silicon ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Silicon Films ◽  
Hot Wire

Problem of catalyst ageing during the hot-wire chemical vapour deposition of thin silicon films

2009 ◽  
Vol 517 (11) ◽  
pp. 3370-3377 ◽  
Author(s):  
D. Hrunski ◽  
M. Scheib ◽  
M. Mertz ◽  
B. Schroeder
Keyword(s):  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Silicon Films ◽  
Hot Wire ◽  
Thin Silicon

scholarly journals Amorphous silicon thin film solar cells deposited entirely by hot-wire chemical vapour deposition at low temperature (<150 °C)

2009 ◽  
Vol 517 (12) ◽  
pp. 3575-3577 ◽  
Author(s):  
Fernando Villar ◽  
Aldrin Antony ◽  
Jordi Escarré ◽  
Daniel Ibarz ◽  
Rubén Roldán ◽  
...  
Keyword(s):  
Thin Film ◽  
Solar Cells ◽  
Low Temperature ◽  
Amorphous Silicon ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Thin Film Solar Cells ◽  
Hot Wire ◽  
Silicon Thin Film
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