An efficient surface-enhanced Raman scattering substrate based on silver nanoparticles/silicon pyramid arrays structure is theoretically investigated and experimentally demonstrated. The electric field distributions using finite-element-method are calculated. The surface-enhanced Raman
scattering behaviors of sensitivity, uniformity and stability are emphatically discussed and compared by the detection of crystal violet. These theoretical and experimental results reveal that the silver nanoparticles/silicon pyramid arrays substrate is expected to be an effective surface-enhanced
Raman scattering platform for label-free sensitive surfaceenhanced Raman spectroscopy detection in areas of biotechnology, medicine and food safety.