Influence of monitor passband width on the layer thickness determination during deposition of a dense-wavelength-division-multiplexing filter

2006 ◽  
Vol 45 (7) ◽  
pp. 1344 ◽  
Author(s):  
Cheng-Chung Lee ◽  
Chien-Cheng Kuo ◽  
Sheng-Hui Chen
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