scholarly journals Lloyd’s Interference Lithography System Employing Beam Shaping Technique for Wafer-scale Nano-patterning

2016 ◽  
Author(s):  
Han-Jung Chang ◽  
Ping-Chien Chang ◽  
Yung-Jr Hung
Keyword(s):  
Beam Shaping ◽  
Interference Lithography ◽  
Wafer Scale ◽  
Shaping Technique ◽  
Nano Patterning ◽  
Lithography System

Tunable two-mirror interference lithography system for wafer-scale nanopatterning

2011 ◽  
Vol 36 (16) ◽  
pp. 3176 ◽  
Author(s):  
Weidong Mao ◽  
Ishan Wathuthanthri ◽  
Chang-Hwan Choi
Keyword(s):  
Interference Lithography ◽  
Wafer Scale ◽  
Lithography System

scholarly journals Slit Beam Shaping Technique for Femtosecond Laser Inscription of Enhanced Plane-by-Plane FBGs

2020 ◽  
Vol 38 (16) ◽  
pp. 4526-4532 ◽  
Author(s):  
Pablo Roldan-Varona ◽  
David Pallares-Aldeiturriaga ◽  
Luis Rodriguez-Cobo ◽  
Jose Miguel Lopez-Higuera
Keyword(s):  
Femtosecond Laser ◽  
Beam Shaping ◽  
Shaping Technique

Use of beam-shaping optics for wafer-scaled nanopatterning in laser interference lithography

2019 ◽  
Vol 125 (5) ◽  
Author(s):  
Dominik Weber ◽  
Robert Heimburger ◽  
Dirk Hildebrand ◽  
Toni Junghans ◽  
Gianina Schondelmaier ◽  
...  
Keyword(s):  
Beam Shaping ◽  
Interference Lithography ◽  
Laser Interference Lithography ◽  
Laser Interference

Implementation of a SVWP-based laser beam shaping technique for generation of 100-mJ-level picosecond pulses

2016 ◽  
Vol 55 (28) ◽  
pp. 8007 ◽  
Author(s):  
J. Adamonis ◽  
A. Aleknavičius ◽  
K. Michailovas ◽  
S. Balickas ◽  
V. Petrauskienė ◽  
...  
Keyword(s):  
Laser Beam ◽  
Beam Shaping ◽  
Laser Beam Shaping ◽  
Picosecond Pulses ◽  
Shaping Technique
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