Theoretical study of micro-structure fabrication by multi-beam laser interference lithography with different polarization combinations

In this study, we systematically and comprehensively investigated the influence of polarization angle on the fabrication of micro-structures by multi-beam laser interference lithography. Using theoretical analysis and simulation, we studied the effect of different polarization combinations, i.e. transverse electric (TE) and transverse magnetic (TM) polarization combinations, on the characteristics of the micro-structures fabricated by three-, four-, and six-beam laser interference lithography. We successfully obtained micro-structures with different periodic patterns such as honeycomb dots, quasi-elliptic dots, different square dots, and quasi-triangular dots. The simulation results illustrate that polarization affects the formation of interference patterns, pattern contrasts, and periods. The methods discussed herein are simple, low cost, and allow excellent control over structural parameters, and hence are useful for the micro-structure manufacturing industry.

Laser Interference Lithography for Fabrication of Planar Scale Gratings for Optical Metrology

Laser interference lithography is an attractive method for the fabrication of a large-area two-dimensional planar scale grating, which can be employed as a scale for multi-axis optical encoders or a diffractive optical element in many types of optical sensors. Especially, optical configurations such as Lloyd’s mirror interferometer based on the division of wavefront method can generate interference fringe fields for the patterning of grating pattern structures at a single exposure in a stable manner. For the fabrication of a two-dimensional scale grating to be used in a planar/surface encoder, an orthogonal two-axis Lloyd’s mirror interferometer, which has been realized through innovation to Lloyd’s mirror interferometer, has been developed. In addition, the concept of the patterning of the two-dimensional orthogonal pattern structure at a single exposure has been extended to the non-orthogonal two-axis Lloyd’s mirror interferometer. Furthermore, the optical setup for the non-orthogonal two-axis Lloyd’s mirror interferometer has been optimized for the fabrication of a large-area scale grating. In this review article, principles of generating interference fringe fields for the fabrication of a scale grating based on the interference lithography are reviewed, while focusing on the fabrication of a two-dimensional scale grating for planar/surface encoders. Verification of the pitch of the fabricated pattern structures, whose accuracy strongly affects the performance of planar/surface encoders, is also an important task to be addressed. In this paper, major methods for the evaluation of a grating pitch are also reviewed.

Incidence Angle Effects on the Fabrication of Microstructures Using Six-Beam Laser Interference Lithography

This paper presents a theoretical demonstration of diverse microstructure fabrication by changing the angle of incidence of a six-beam laser interference lithography system. Different combinations are formed with transverse electric (TE) and transverse magnetic (TM) polarizations and various microstructures are simulated by controlling the high-reflectivity mirror group to adjust the incidence angle. This study indicates that the incidence angle has a considerable influence on the shape and period of the lattice, thereby contributing to the fabrication of microstructures with different arrangements. These structures include donut, circle, D-type, rectangular, triangular, U-type, and honeycomb lattices. The six-beam laser interference lithography technique is expected to benefit microstructure fabrication because of its simple operation, large writing area, and low cost, thereby promoting the development of micro-optics.