scholarly journals Unimorph deformable mirror for space telescopes: environmental testing

2016 ◽  
Vol 24 (2) ◽  
pp. 1528 ◽  
Author(s):  
Peter Rausch ◽  
Sven Verpoort ◽  
Ulrich Wittrock
2016 ◽  
Author(s):  
M. Copeland ◽  
I Price ◽  
F. Rigaut ◽  
G. Bloxham ◽  
R. Boz ◽  
...  

2012 ◽  
Author(s):  
Marie Laslandes ◽  
Claire Hourtoule ◽  
Emmanuel Hugot ◽  
Marc Ferrari ◽  
Céline Lopez ◽  
...  

2015 ◽  
Vol 23 (15) ◽  
pp. 19469 ◽  
Author(s):  
Peter Rausch ◽  
Sven Verpoort ◽  
Ulrich Wittrock

2006 ◽  
Vol 133 ◽  
pp. 645-648 ◽  
Author(s):  
B. E. Kruschwitz ◽  
R. Jungquist ◽  
J. Qiao ◽  
S. Abbey ◽  
S. E. Dean ◽  
...  

Author(s):  
Hongbin Yu ◽  
Haiqing Chen ◽  
Zimin Zhu ◽  
Chao Wang ◽  
Dacheng Zhang ◽  
...  
Keyword(s):  

Author(s):  
Y. Lu ◽  
E. Ramsay ◽  
C. Stockbridge ◽  
F. H. Koklu ◽  
A. Yurt ◽  
...  

Abstract We present a method for correcting spherical aberrations in solid immersion microscopy through the use of a deformable mirror. Aberrations in solid immersion imaging for failure analysis can be induced through off-axis imaging, errors in lens fabrication or mismatch of design and substrate wafer thickness. RMS wavefront error correction of 30% is demonstrated in the case of substrate wafer thickness error.


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