Correcting for Spherical Aberrations in Solid Immersion Microscopy Using a Deformable Mirror

2011 ◽  
Author(s):  
Y. Lu ◽  
E. Ramsay ◽  
C. Stockbridge ◽  
F. H. Koklu ◽  
A. Yurt ◽  
...  
Keyword(s):  
Failure Analysis ◽  
Error Correction ◽  
Deformable Mirror ◽  
Wafer Thickness ◽  
Wavefront Error ◽  
Substrate Wafer ◽  
Thickness Error

Abstract We present a method for correcting spherical aberrations in solid immersion microscopy through the use of a deformable mirror. Aberrations in solid immersion imaging for failure analysis can be induced through off-axis imaging, errors in lens fabrication or mismatch of design and substrate wafer thickness. RMS wavefront error correction of 30% is demonstrated in the case of substrate wafer thickness error.

Approach for deformable mirror wavefront error correction

2019 ◽  
Vol 58 (01) ◽  
pp. 1
Author(s):  
Deqing Ren ◽  
Gang Wang ◽  
Xi Zhang
Keyword(s):  
Error Correction ◽  
Deformable Mirror ◽  
Wavefront Error

Large-aperture deformable mirror correction of tiled-grating wavefront error

2006 ◽  
Vol 133 ◽  
pp. 645-648 ◽  
Author(s):  
B. E. Kruschwitz ◽  
R. Jungquist ◽  
J. Qiao ◽  
S. Abbey ◽  
S. E. Dean ◽  
...  
Keyword(s):  
Deformable Mirror ◽  
Large Aperture ◽  
Wavefront Error

scholarly journals Wavefront error correction and Earth-like planet detection by a self-coherent camera in space

2008 ◽  
Vol 488 (1) ◽  
pp. L9-L12 ◽  
Author(s):  
R. Galicher ◽  
P. Baudoz ◽  
G. Rousset
Keyword(s):  
Error Correction ◽  
Planet Detection ◽  
Wavefront Error

Use Of Adaptive Optics Element For Wavefront Error Correction In The Gemini CO2 Laser Fusion System

1980 ◽  
Author(s):  
V. K. Viswanathan ◽  
J. V. Parker ◽  
T. A. Nussmier ◽  
C. J. Swigert ◽  
W. King ◽  
...  
Keyword(s):  
Error Correction ◽  
Adaptive Optics ◽  
Laser Fusion ◽  
Fusion System ◽  
Wavefront Error

scholarly journals Wavefront Error Correction with Adaptive Optics in Diabetic Retinopathy

2014 ◽  
Vol 91 (10) ◽  
pp. 1238-1243 ◽  
Author(s):  
Ali Kord Valeshabad ◽  
Justin Wanek ◽  
Patricia Grant ◽  
Jennifer I. Lim ◽  
Felix Y. Chau ◽  
...  
Keyword(s):  
Diabetic Retinopathy ◽  
Error Correction ◽  
Adaptive Optics ◽  
Wavefront Error

Analysis of a compliant static deformable mirror for wavefront error cancellation

2011 ◽  
Author(s):  
F. Ernesto Penado ◽  
James H. Clark III ◽  
Joel Dugdale
Keyword(s):  
Deformable Mirror ◽  
Error Cancellation ◽  
Wavefront Error

Single Crystal Piezoelectric Actuators for Advanced Deformable Mirrors

Aerospace ◽  
2004 ◽  
Author(s):  
X. N. Jiang ◽  
P. W. Rehrig ◽  
W. S. Hackenberger ◽  
J. Moore ◽  
S. Chodimella ◽  
...  
Keyword(s):  
Single Crystal ◽  
Adaptive Optics ◽  
System Modeling ◽  
Optical Design ◽  
Piezoelectric Actuators ◽  
Fast Response ◽  
Deformable Mirror ◽  
Wavefront Error ◽  
Single Crystal Plate ◽  
Rms Error

In this paper, single crystal piezoelectric actuators are developed and demonstrated as a means of increasing actuator authority while maintaining strain precision for adaptive optics used large throw deformable mirror applications. Single crystal (PMN-PT crystal) stack actuators with foot print size of 5 mm × 5 mm and height varied from 16 mm to 21 mm have been designed, fabricated and tested. The actuation stroke larger than 50 μm is obtained under driving electric field of 15 KV/cm for single crystal stack actuators. In-plane actuation stroke is about 25 μm under 8KV/cm for single crystal plate actuators. The characterization results show that the single crystal piezoelectric actuators hold enhanced stroke and coupling coefficient (>0.83) under lower driving field comparing with PZT counterpart, while keep the nature of piezoelectric actuations with high precision, high resolution, fast response under high preload stress. The potential benefits of incorporating these actuators in a deformable mirror (DM) design were demonstrated by system modeling using the Integrated Optical Design Analysis Software (IODA) developed by SRS. The modeling shows that low order aberrations with peak to valley errors as large as 40 microns could be corrected to diffraction limited performance with a reasonable number of actuators and acceptable actuator forces and face sheet stresses. In the case of DM correction with 20 microns of 1st-Order Astigmatism-X error (Peak to valley: 38.74 μm, RMS error: 8.13 μm), the corrected wavefront error was reduced to PV of 0.26 μm and RMS error of 0.024 μm, which suggest promise for large throw DM applications.

An adaptive wavefront error correction system for the LASL gemini laser fusion system

1979 ◽  
Vol 15 (9) ◽  
pp. 983-983 ◽  
Author(s):  
V. Viswanathan ◽  
J. Parker ◽  
T. Nussmeier ◽  
C. Swigert ◽  
W. King ◽  
...  
Keyword(s):  
Error Correction ◽  
Laser Fusion ◽  
Fusion System ◽  
Wavefront Error ◽  
Correction System
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