Dielectric-elastomer-based fabrication method for varifocal microlens array

Traditional optical lithography techniques to fabricate three-dimensional (3D) nanostructures are complicated and time consuming. Due to the capability to replicate nanostructures repeatedly in a large area with high resolution and uniformity, nanoimprint (NI) has been recognized as one of the promising approaches to fabricate 3-D nanostructures with high throughput and low cost. This paper introduces a novel 3-D nanostructure fabrication method by nanoimprint on silicon substrate. Nanoscale gratings and microlens array are taken as examples of 3-D nanostructures fabricated by nanoimprint. High fidelity demonstrates the possibility of nanoimprint to fabricate 3-D nanostructures on silicon substrate.

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Fabrication Method of Double-Microlens Array Using Self-Alignment Technology

Japanese Journal of Applied Physics ◽

10.1143/jjap.43.5840 ◽

2004 ◽

Vol 43 (8B) ◽

pp. 5840-5844 ◽

Cited By ~ 19

Author(s):

Kazuya Kitamura ◽

Kuniaki Okada ◽

Noboru Fujita ◽

Yukiko Nagasaka ◽

Minoru Ueda ◽

...

Keyword(s):

Microlens Array ◽

Fabrication Method

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New high fill-factor triangular microlens array fabrication method using UV proximity printing

Microsystem Technologies ◽

10.1007/s00542-009-0888-0 ◽

2009 ◽

Vol 15 (8) ◽

pp. 1263-1264 ◽

Cited By ~ 1

Author(s):

Tsung-Hung Lin ◽

Hsiharng Yang ◽

Ching-Kong Chao ◽

Shih-Yu Hung

Keyword(s):

Fill Factor ◽

Microlens Array ◽

Fabrication Method ◽

High Fill Factor ◽

Array Fabrication

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A Novel Fabrication Method for Mold Insert of Injection Molded Microlens Array

Materials Science Forum - Advances in Materials Manufacturing Science and Technology II ◽

10.4028/0-87849-421-9.665 ◽

2006 ◽

pp. 665-668

Author(s):

Yung Kang Shen

Keyword(s):

Mold Insert ◽

Microlens Array ◽

Fabrication Method ◽

Injection Molded

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Fabrication of Multifocal Microlens Array by One Step Exposure Process

Micromachines ◽

10.3390/mi12091097 ◽

2021 ◽

Vol 12 (9) ◽

pp. 1097

Author(s):

Wei Yuan ◽

Yajuan Cai ◽

Cheng Xu ◽

Hui Pang ◽

Axiu Cao ◽

...

Keyword(s):

Microlens Array ◽

Exposure Dose ◽

Optical Systems ◽

Nonlinear Relationship ◽

Fabrication Method ◽

Practical Applications ◽

Continuous Surface ◽

One Step ◽

Field Imaging ◽

Exposure Process

Microlenses can be widely used in integrated micro-optical systems. However, in some special applications, such as light field imaging systems, multifocal microlens arrays (MLA) are expected to improve imaging resolution. For the fabrication of multifocal MLA, the traditional fabrication method is no longer applicable. To solve this problem, a fabrication method of multifocal MLA by a one step exposure process is proposed. Through the analyses and research of photoresist AZ9260, the nonlinear relationship between exposure dose and exposure depth is established. In the design of the mask, the mask pattern is corrected according to the nonlinear relationship to obtain the final mask. The continuous surface of the multifocal MLA is fabricated by the mask moving exposure. The experimental results show that the prepared multifocal MLA has high filling factor and surface fidelity. What is more, this method is simple and efficient to use in practical applications.

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