Fabrication Method of Double-Microlens Array Using Self-Alignment Technology

2004 ◽  
Vol 43 (8B) ◽  
pp. 5840-5844 ◽  
Author(s):  
Kazuya Kitamura ◽  
Kuniaki Okada ◽  
Noboru Fujita ◽  
Yukiko Nagasaka ◽  
Minoru Ueda ◽  
...  
Keyword(s):  
Microlens Array ◽  
Fabrication Method

Realization of Three-Dimensional Nanostructure Fabrication by Nanoimprint on Silicon Substrate

2011 ◽  
Vol 211-212 ◽  
pp. 1105-1109
Author(s):  
Xi Qiu Fan
Keyword(s):  
Silicon Substrate ◽  
Low Cost ◽  
Three Dimensional ◽  
Microlens Array ◽  
Optical Lithography ◽  
High Fidelity ◽  
Fabrication Method ◽  
Nanostructure Fabrication ◽  
Large Area ◽  
3D Nanostructures

Traditional optical lithography techniques to fabricate three-dimensional (3D) nanostructures are complicated and time consuming. Due to the capability to replicate nanostructures repeatedly in a large area with high resolution and uniformity, nanoimprint (NI) has been recognized as one of the promising approaches to fabricate 3-D nanostructures with high throughput and low cost. This paper introduces a novel 3-D nanostructure fabrication method by nanoimprint on silicon substrate. Nanoscale gratings and microlens array are taken as examples of 3-D nanostructures fabricated by nanoimprint. High fidelity demonstrates the possibility of nanoimprint to fabricate 3-D nanostructures on silicon substrate.

scholarly journals New high fill-factor triangular microlens array fabrication method using UV proximity printing

2009 ◽  
Vol 15 (8) ◽  
pp. 1263-1264 ◽  
Author(s):  
Tsung-Hung Lin ◽  
Hsiharng Yang ◽  
Ching-Kong Chao ◽  
Shih-Yu Hung
Keyword(s):  
Fill Factor ◽  
Microlens Array ◽  
Fabrication Method ◽  
High Fill Factor ◽  
Array Fabrication

scholarly journals Dielectric-elastomer-based fabrication method for varifocal microlens array

2017 ◽  
Vol 25 (25) ◽  
pp. 31708 ◽  
Author(s):  
Lihui Wang ◽  
Tomohiko Hayakawa ◽  
Masatoshi Ishikawa
Keyword(s):  
Microlens Array ◽  
Dielectric Elastomer ◽  
Fabrication Method

scholarly journals Fabrication of Multifocal Microlens Array by One Step Exposure Process

Micromachines ◽  
2021 ◽  
Vol 12 (9) ◽  
pp. 1097
Author(s):  
Wei Yuan ◽  
Yajuan Cai ◽  
Cheng Xu ◽  
Hui Pang ◽  
Axiu Cao ◽  
...  
Keyword(s):  
Microlens Array ◽  
Exposure Dose ◽  
Optical Systems ◽  
Nonlinear Relationship ◽  
Fabrication Method ◽  
Practical Applications ◽  
Continuous Surface ◽  
One Step ◽  
Field Imaging ◽  
Exposure Process

Microlenses can be widely used in integrated micro-optical systems. However, in some special applications, such as light field imaging systems, multifocal microlens arrays (MLA) are expected to improve imaging resolution. For the fabrication of multifocal MLA, the traditional fabrication method is no longer applicable. To solve this problem, a fabrication method of multifocal MLA by a one step exposure process is proposed. Through the analyses and research of photoresist AZ9260, the nonlinear relationship between exposure dose and exposure depth is established. In the design of the mask, the mask pattern is corrected according to the nonlinear relationship to obtain the final mask. The continuous surface of the multifocal MLA is fabricated by the mask moving exposure. The experimental results show that the prepared multifocal MLA has high filling factor and surface fidelity. What is more, this method is simple and efficient to use in practical applications.

Fabrication Method for the Microlens Array of High F-number

2017 ◽  
Vol 46 (2) ◽  
pp. 222004 ◽  
Author(s):  
刘鑫 LIU Xin ◽  
张满 ZHANG Man ◽  
史立芳 SHI Li-fang ◽  
曹阿秀 CAO A-xiu ◽  
邓启凌 DENG Qi-ling
Keyword(s):  
Microlens Array ◽  
Fabrication Method

scholarly journals New high fill-factor triangular microlens array fabrication method using UV proximity printing

2008 ◽  
Vol 15 (8) ◽  
pp. 1255-1261 ◽  
Author(s):  
Tsung-Hung Lin ◽  
Hsiharng Yang ◽  
Ching-Kong Chao ◽  
Shih-Yu Hung
Keyword(s):  
Fill Factor ◽  
Microlens Array ◽  
Fabrication Method ◽  
High Fill Factor ◽  
Array Fabrication

A new fabrication method for an asymmetric microlens array light control film using inclined exposure and an incomplete thermal reflow process

2014 ◽  
Vol 38 (1) ◽  
pp. 85-92 ◽  
Author(s):  
Tsung-Hung Lin ◽  
Shih-Yu Hung ◽  
Chien-Hsin Hung ◽  
Ming-Ho Shen ◽  
Ching-Kong Chao ◽  
...  
Keyword(s):  
Microlens Array ◽  
Fabrication Method ◽  
Light Control ◽  
Reflow Process ◽  
Control Film ◽  
Thermal Reflow

A Novel Fabrication Method for Mold Insert of Injection Molded Microlens Array

2006 ◽  
Vol 532-533 ◽  
pp. 665-668 ◽  
Author(s):  
Yung Kang Shen
Keyword(s):  
Surface Roughness ◽  
Injection Molding ◽  
Room Temperature ◽  
Mold Insert ◽  
Microlens Array ◽  
Average Surface Roughness ◽  
Fabrication Method ◽  
Average Surface ◽  
Injection Molded ◽  
Injection Compression Molding

This paper reports a simple and novel procedure for mold insert of microlens array. The micro injection molding (MIM) and micro injection-compression molding (MICM) are used to replicate the microlens array. The 200×200 arrays of molded microlens, with a diameter of 150 $m, a pitch of 200 $m and a sag height of 11.236 $m have been successfully fabricated. The average surface roughness of the Ni mold insert is 6.916 nm. The average surface roughness of the molded microlens array is 4.608 nm for MIM and 4.555 nm for MICM. The complete fabrication process of mold insert is executed at room temperature and low pressure for this paper.

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