Liquid-Crystai Polymer. Polymer Liquid-Crystal. Liquid-Crystalline Polymer (LCP and PLC)

2016 ◽  
Author(s):  
M. Barón ◽  
R. F. T. Stepto
Keyword(s):  
Liquid Crystal ◽  
Liquid Crystalline Polymer ◽  
Liquid Crystalline ◽  
Crystalline Polymer ◽  
Polymer Liquid ◽  
Polymer Liquid Crystal

Development of a Hermetically Sealed Enclosure for MEMS in Chip-on-Flex Modules Using Liquid Crystalline Polymer (LCP)

2005 ◽  
Author(s):  
Morgan Chen ◽  
Nicole Evers ◽  
Chris Kapusta ◽  
Joe Iannotti ◽  
Anh-Vu Pham ◽  
...  
Keyword(s):  
Liquid Crystal ◽  
Low Temperature ◽  
Insertion Loss ◽  
Liquid Crystalline Polymer ◽  
Liquid Crystalline ◽  
Crystalline Polymer ◽  
Microelectromechanical System ◽  
Mems Switch ◽  
Crystal Polymer ◽  
X Band

We present the development of a hermetic shield packaging enclosure for RF microelectromechanical system switches (MEMS) using Liquid Crystal Polymer (LCP). A cavity formed in LCP has been laminated, at low temperature, onto a Si MEMS switch to create a hermetically sealed package. The hermetically sealed enclosure is a stack-up layer of the multi-layer organic chip-on-flex system-on-a-package (SOP). The entire SOP hermetically sealed package has a total insertion loss of ∼0.5 dB at X-band. E595 outgas tests demonstrate that the LCP package is reliable and hermetically protects the MEMS switch.

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