A Study of Uniform Approximation of Plane Gratings with Periodic Surface Resistance

Hideaki Wakabayashi; Jiro Yamakita

doi:10.1541/ieejfms.131.125

A Study of Uniform Approximation of Plane Gratings with Periodic Surface Resistance

IEEJ Transactions on Fundamentals and Materials ◽

10.1541/ieejfms.131.125 ◽

2011 ◽

Vol 131 (2) ◽

pp. 125-131

Author(s):

Hideaki Wakabayashi ◽

Jiro Yamakita

Keyword(s):

Uniform Approximation ◽

Surface Resistance ◽

Periodic Surface

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A Stationary Solution of High-Energy Electron Reflection (HEER) for An Arbitrary Surface

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100135472 ◽

1990 ◽

Vol 48 (2) ◽

pp. 374-375

Author(s):

YIQUN MA

Keyword(s):

Stationary Solution ◽

High Energy ◽

Bloch Wave ◽

Dynamical Theory ◽

High Energy Electron ◽

Bulk Materials ◽

Periodic Surface ◽

Electron Transmission ◽

Electron Reflection ◽

Long Time

For a long time, the development of dynamical theory for HEER has been stagnated for several reasons. Although the Bloch wave method is powerful for the understanding of physical insights of electron diffraction, particularly electron transmission diffraction, it is not readily available for the simulation of various surface imperfection in electron reflection diffraction since it is basically a method for bulk materials and perfect surface. When the multislice method due to Cowley & Moodie is used for electron reflection, the “edge effects” stand firmly in the way of reaching a stationary solution for HEER. The multislice method due to Maksym & Beeby is valid only for an 2-D periodic surface.Now, a method for solving stationary solution of HEER for an arbitrary surface is available, which is called the Edge Patching method in Multislice-Only mode (the EPMO method). The analytical basis for this method can be attributed to two important characters of HEER: 1) 2-D dependence of the wave fields and 2) the Picard iteractionlike character of multislice calculation due to Cowley and Moodie in the Bragg case.

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