Structure-Based Huge Hard-Spring Torsional Resonator Coupled with Thermal Bending for Infrared Sensor
2020 ◽
Vol 140
(9)
◽
pp. 240-245
2010 ◽
Vol 130
(9)
◽
pp. 437-442
2014 ◽
Vol 134
(7)
◽
pp. 193-198
Keyword(s):
2012 ◽
Vol 132
(3)
◽
pp. 53-57
1999 ◽
Keyword(s):
2019 ◽