Characteristics of Laser-Ablated Plasma and Properties Of Diamond-Like Carbon Film In Pulsed Laser Deposition

2000 ◽  
Vol 648 ◽  
Author(s):  
Yukihiko Yamagata ◽  
Tamiko Ohshima ◽  
Tomoaki Ikegami ◽  
Raj K. Thareja ◽  
Kenji Ebihara ◽  
...  

AbstractCharacteristics of laser-ablated carbon plasma and properties of diamond-like carbon film in KrF pulsed laser deposition were investigated using laser-induced fluorescence (LIF) and optical emission spectroscopy. Two-dimensional LIF images of C2 (Swan band, d3Φg – a3Φu) and C3 (Comet Head System, A1Φu –X1Σg+) molecules were detected as a function of laser energy density by narrow band pass filters and an intensified CCD camera. C2 LIF intensity is found to be weaker in the central part of the plume than that at the periphery at incident energy greater than 6 J/cm2. It is conjectured that C2 molecules are dissociated by collision with energetic species in the central part of the ablation plume, and degrade the diamond-like property of deposited films.

2021 ◽  
Vol 70 (4) ◽  
pp. 046801-046801
Author(s):  
Lu Yi-Min ◽  
◽  
Huang Guo-Jun ◽  
Cheng Yong ◽  
Wang Sai ◽  
...  

RSC Advances ◽  
2016 ◽  
Vol 6 (8) ◽  
pp. 6016-6028 ◽  
Author(s):  
Madhusmita Panda ◽  
G. Mangamma ◽  
R. Krishnan ◽  
Kishore K. Madapu ◽  
D. Nanda Gopala Krishna ◽  
...  

Raman mapping and AFAM are useful tools to evaluate the relative stiffness of DLC films embedded with micro graphitic particulates.


2021 ◽  
pp. 108615
Author(s):  
Yimin Lu ◽  
Guojun Huang ◽  
Sai Wang ◽  
Lin Xi ◽  
Guanghu Qin ◽  
...  

1999 ◽  
Vol 593 ◽  
Author(s):  
Y Yamagata ◽  
A. Sharma ◽  
J. Narayan ◽  
R. M. Mayo ◽  
J. W. Newman ◽  
...  

ABSTRACTOptical emission study of ablation plasma plumes from single crystal graphite (SCG) and amorphous carbon (a-C) targets during the preparation of diamond-like carbon (DLC) films by KrF excimer pulsed laser deposition (PLD) has been investigated. The C I emission intensity increases with laser energy density (EL) increase, while the C2 emission changes drastically with EL for both ablated plasma plumes. The C2/C emission intensity ratio for the a-C plume decreases with EL increase, while the C2/C ratio for the SCG plume decreases with EL increase up to 3.0 J/cm2, then increases slightly with further EL increase Nanohardness of the DLC films decreases with the C2/C ratio increase. It is suggested that the C2 molecule in the plasma plume does not play an important role in producing high quality DLC films, and that the C2/C ratio is a good parameter to monitor the PLD process.


2019 ◽  
Vol 48 (11) ◽  
pp. 1117002
Author(s):  
程 勇 Cheng Yong ◽  
陆益敏 Lu Yimin ◽  
黄国俊 Huang Guojun ◽  
米朝伟 Mi Chaowei ◽  
黎 伟 Li Wei ◽  
...  

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