Role of RF power in growth and characterization of RF magnetron sputtering GaN/glass thin film

Emerging Materials Research ◽

10.1680/jemmr.19.00013 ◽

2019 ◽

Vol 8 (3) ◽

pp. 320-330 ◽

Author(s):

Asim Mantarcı

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Rf Magnetron Sputtering ◽

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Synthesis and characterization of LSGM thin film electrolyte by RF magnetron sputtering for LT-SOFCS

Solid State Ionics ◽

10.1016/j.ssi.2008.02.039 ◽

2008 ◽

Vol 179 (21-26) ◽

pp. 1268-1272 ◽

Author(s):

K. Sasaki ◽

M. Muranaka ◽

A. Suzuki ◽

T. Terai

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Rf Magnetron Sputtering ◽

Synthesis And Characterization ◽

Thin Film Electrolyte ◽

Film Electrolyte

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Growing and Luminous Characterization of ZnGa2O4:Mn Thin Film Deposited by RF Magnetron Sputtering

Journal of the Korean Ceramic Society ◽

10.4191/kcers.2003.40.7.652 ◽

2003 ◽

Vol 40 (7) ◽

pp. 652-656

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Rf Magnetron Sputtering

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Fabrication and characterization of thin film electrolytes deposited by RF magnetron sputtering for low temperature solid oxide fuel cells

Journal of Power Sources ◽

10.1016/j.jpowsour.2005.12.050 ◽

2006 ◽

Vol 160 (1) ◽

pp. 202-206 ◽

Author(s):

Yeong Yoo

Keyword(s):

Thin Film ◽

Low Temperature ◽

Magnetron Sputtering ◽

Solid Oxide Fuel Cells ◽

Rf Magnetron Sputtering ◽

Solid Oxide ◽

Fabrication And Characterization

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Preparation and characterization of La0.9Sr0.1Ga0.8Mg0.2O3−δ thin film electrolyte deposited by RF magnetron sputtering on the porous anode support for IT-SOFC

Vacuum ◽

10.1016/j.vacuum.2011.11.002 ◽

2012 ◽

Vol 86 (8) ◽

pp. 1203-1209 ◽

Author(s):

Hongyan Sun ◽

Wenhui Ma ◽

Jie Yu ◽

Xiuhua Chen ◽

Wei Sen ◽

...

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Rf Magnetron Sputtering ◽

Thin Film Electrolyte ◽

Film Electrolyte ◽

Anode Support ◽

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Fabrication and Characterization of Crystalline Thin Film MoS2 Prepared By RF Magnetron Sputtering

ECS Meeting Abstracts ◽

10.1149/ma2018-02/1/2 ◽

2018 ◽

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Rf Magnetron Sputtering ◽

Fabrication And Characterization

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Characterization of lithium borophosphate glass thin film electrolytes deposited by RF-magnetron sputtering for micro-batteries

Solid State Ionics ◽

10.1016/j.ssi.2012.05.008 ◽

2012 ◽

Vol 225 ◽

pp. 636-640 ◽

Author(s):

Yongsub Yoon ◽

Chanhwi Park ◽

Junghoon Kim ◽

Dongwook Shin

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Rf Magnetron Sputtering ◽

Borophosphate Glass

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Microstructural Characterization of La-Cr-O Thin Film Deposited by RF Magnetron Sputtering on the Stainless Steel Interconnect Materials for SOFC Application

NATO Science Series - Fuel Cell Technologies: State and Perspectives ◽

10.1007/1-4020-3498-9_41 ◽

2006 ◽

pp. 355-371

Author(s):

N. Orlovskaya ◽

A. Nicholls ◽

S. Yarmolenko ◽

J. Sankar ◽

C. Johnson ◽

...

Keyword(s):

Thin Film ◽

Stainless Steel ◽

Magnetron Sputtering ◽

Microstructural Characterization ◽

Rf Magnetron Sputtering

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Fabrication and Characterization of the LSGM Thin Film Electrolyte by RF Magnetron Sputtering

ECS Meeting Abstracts ◽

10.1149/ma2008-02/13/1371 ◽

2008 ◽

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Rf Magnetron Sputtering ◽

Thin Film Electrolyte ◽

Film Electrolyte ◽

Fabrication And Characterization

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Preparation and characterization of highly c-axis textured MgO buffer layer grown on Si(100) substrate by RF magnetron sputtering for use as growth template of ferroelectric thin film

Journal of Materials Science Materials in Electronics ◽

10.1007/s10854-010-0155-2 ◽

2010 ◽

Vol 22 (4) ◽

pp. 430-436 ◽

Author(s):

Wen-Ching Shih ◽

Tzyy-Long Wang ◽

Ming-Han Chiang ◽

Mu-Shiang Wu

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Buffer Layer ◽

Ferroelectric Thin Film ◽

Rf Magnetron Sputtering

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Characterization of a Flexible InGaSb/PI Thin Film Grown by RF Magnetron Sputtering and Aqueous Stability Improvement via Surface Coating

physica status solidi (a) ◽

10.1002/pssa.201800860 ◽

2018 ◽

Vol 216 (4) ◽

pp. 1800860 ◽

Author(s):

Naoki Nishimoto ◽

Junko Fujihara

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Surface Coating ◽

Rf Magnetron Sputtering

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