Gradients and Assumptions Affect Interpretation of Laboratory-Measured Gas-Phase Transport

2015 ◽  
Vol 79 (4) ◽  
pp. 1018-1029 ◽  
Author(s):  
Robert P. Ewing ◽  
Behzad Ghanbarian ◽  
Allen G. Hunt
AIChE Journal ◽  
2015 ◽  
Vol 61 (11) ◽  
pp. 4013-4019 ◽  
Author(s):  
Galina Pavlovskaya ◽  
Joseph Six ◽  
Thomas Meersman ◽  
Navin Gopinathan ◽  
Sean P. Rigby

1990 ◽  
Vol 46 (1-4) ◽  
pp. 102-107 ◽  
Author(s):  
L. Konstantinov ◽  
R. Nowak ◽  
P. Hess

2015 ◽  
Vol 10 (9) ◽  
pp. 785-790 ◽  
Author(s):  
Luda Wang ◽  
Lee W. Drahushuk ◽  
Lauren Cantley ◽  
Steven P. Koenig ◽  
Xinghui Liu ◽  
...  

1995 ◽  
Vol 378 ◽  
Author(s):  
Koji Izunome ◽  
Xinming Huang ◽  
Shiniji Togawa ◽  
Kazutaka Terashima ◽  
Shigeyuki Kimura

AbstractIn Czochralski-grown (CZ) silicon single crystals, antimony (Sb) doping decreases the oxygen concentration by enhancing oxygen evaporation from the melt surface. In this study, Ar ambient pressures of around 100 Torr over the silicon melt were found to suppress evaporation of oxide species. To clarify the effect of the growth chamber ambient pressure on oxygen concentration, heavily Sb-doped CZ silicon crystals were grown under Ar pressures of 30, 60, and 100 Torr. Increasing Ar pressure increases the oxygen and Sb concentrations at the melt surface. The oxygen concentration under an Ar pressure of 100 Torr was 1.2 times higher that under 30 Torr when the solidified fractions are 0.5 or larger. The oxygen evaporation rate is controllable by gas phase transport of Sb2O at high Ar pressures.


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