Design of an RF Antenna for a Large0Bore, High Power, Steady State Plasma Processing Chamber for Material Separation
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2001 ◽
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2003 ◽
Vol 25
(2)
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pp. 192-196
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2007 ◽
Vol 24
(5)
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pp. 1053
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1992 ◽
Vol 43
(4)
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pp. 405-411
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