Numerical modelling of boron removal from silicon by oxidizing gas jet

2020 ◽  
Vol 56 (1) ◽  
pp. 81-92
1997 ◽  
Vol 24 (1-3) ◽  
pp. 180-188
Author(s):  
Shao Yiming ◽  
Zhen Huang ◽  
Siichi Shiga ◽  
Hisao Nakamura ◽  
Takao Karasawa
Keyword(s):  
Gas Jet ◽  

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