Abstract
High resolution optical imaging is critical in assisting backside circuit edit (CE) and optical probing navigation. In this paper, we demonstrated improved optical image quality using VIS-NIR narrow band light emitting diode (LED) illumination in various FIB and optical probing platforms. The proof of concept was demonstrated with both common non-contact air gap lenses and solid immersion lenses (SIL).
CCGS Hudson Expedition 2018-041: high-resolution investigation of deep-water seabed seeps and landslides along the Scotian Slope, offshore Nova Scotia, May 26 - June 15, 2018