Stress measurement in Si-based multi-layer semiconductor heterostructure by using micro-Raman spectroscopy

2016 ◽  
Author(s):  
Wei Qiu ◽  
Lu-Lu Ma ◽  
Qiu Li
Keyword(s):  
Raman Spectroscopy ◽  
Stress Measurement ◽  
Micro Raman Spectroscopy ◽  
Semiconductor Heterostructure

Residual stress measurement in a metal microdevice by micro Raman spectroscopy

2017 ◽  
Vol 27 (10) ◽  
pp. 105014 ◽  
Author(s):  
Chang Song ◽  
Liqun Du ◽  
Leijie Qi ◽  
Yu Li ◽  
Xiaojun Li ◽  
...  
Keyword(s):  
Residual Stress ◽  
Raman Spectroscopy ◽  
Stress Measurement ◽  
Residual Stress Measurement ◽  
Micro Raman Spectroscopy

Measurement of residual stress in a multi-layer semiconductor heterostructure by micro-Raman spectroscopy

2016 ◽  
Vol 32 (5) ◽  
pp. 805-812 ◽  
Author(s):  
Wei Qiu ◽  
Cui-Li Cheng ◽  
Ren-Rong Liang ◽  
Chun-Wang Zhao ◽  
Zhen-Kun Lei ◽  
...  
Keyword(s):  
Residual Stress ◽  
Raman Spectroscopy ◽  
Micro Raman Spectroscopy ◽  
Semiconductor Heterostructure
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