Robust two-time scale control system design for reactive Ion etching system

2003 ◽  
Author(s):  
N. Tudoroiu ◽  
K. Khorasani ◽  
V. Yurkevich
Keyword(s):  
Control System ◽  
System Design ◽  
Time Scale ◽  
Reactive Ion Etching ◽  
Control System Design ◽  
Ion Etching ◽  
Scale Control ◽  
Etching System

scholarly journals A Method of Large-Scale Control System Design Aided by System Visualization Technology

1991 ◽  
Vol 111 (5) ◽  
pp. 194-201
Author(s):  
Takeshi Myoi ◽  
Haruo Amari ◽  
Kouhei Inamura ◽  
Hideki Koike ◽  
Hideaki Kuzuoka ◽  
...  
Keyword(s):  
Control System ◽  
System Design ◽  
Large Scale ◽  
Control System Design ◽  
Visualization Technology ◽  
Scale Control

A method of large-scale control system design aided by system visualization technology

1992 ◽  
Vol 112 (4) ◽  
pp. 108-118 ◽  
Author(s):  
Takeshi Myoi ◽  
Haruo Amari ◽  
Tatuo Hayashi ◽  
Kouhei Inamura ◽  
Hideki Koike ◽  
...  
Keyword(s):  
Control System ◽  
System Design ◽  
Large Scale ◽  
Control System Design ◽  
Visualization Technology ◽  
Scale Control
Sign in / Sign up

Export Citation Format

Share Document