scholarly journals X-Ray Residual Stress Measurement of Aluminum Thin Films with (111)Fiber Texture.

1996 ◽  
Vol 45 (10) ◽  
pp. 1138-1144
Author(s):  
Keisuke TANAKA ◽  
Keisaku ISHIHARA ◽  
Kaoru INOUE
Keyword(s):  
Thin Films ◽  
Residual Stress ◽  
Stress Measurement ◽  
Fiber Texture ◽  
Residual Stress Measurement ◽  
X Ray

Residual Stress of Aluminum Thin Films Sputtered on Silicon Wafers Measured by X-Ray Diffraction

1995 ◽  
Vol 39 ◽  
pp. 267-279
Author(s):  
Keisuke Tanaka ◽  
Keisaku Ishihara ◽  
Yoshiaki Akiniwa
Keyword(s):  
Thin Films ◽  
Residual Stress ◽  
Stress Measurement ◽  
Biaxial Tension ◽  
Film Surface ◽  
Fiber Texture ◽  
Fiber Axis ◽  
X Ray ◽  
Plane Normal ◽  
Out Of Plane

A new method of the X-ray stress measurement was proposed for measuring the residual stress in Al thin films having the [111] fiber texture with the fiber axis perpendicular to the film surface. The strain was measured from Al 222 and 311 diffractions obtained by Cr-Kα radiation. The values of in-plane residual stresses σ11, σ22 and σ12, and out-of-plane normal residual stress, σ33 were determined from the measured strains by using the fundamental formulae derived on the basis of Reuss and Voigt models. The measured residual stress in the thin films was nearly equi-biaxial tension. The magnitude of the tensile residual stress decreased with increasing film thickness.

X-Ray Residual Stress Measurement in Films with Crystallographic Texture and Grain Shape

1995 ◽  
Vol 403 ◽  
Author(s):  
L. G. Yu ◽  
B. C. Hendrix ◽  
K. W. Xu ◽  
J. W. He ◽  
H. C. Gu
Keyword(s):  
Thin Films ◽  
Residual Stress ◽  
Crystallographic Texture ◽  
Grain Shape ◽  
Stress Measurement ◽  
Residual Stress Measurement ◽  
Powerful Method ◽  
X Ray Diffraction ◽  
X Ray ◽  
Ψ Angle

AbstractX-ray diffraction provides an easy and powerful method for measuring residual stress in thin films. However, nonlinearity of the d vs. sin2ψ relation can lead to the misinterpretation of results, especially when one of the measurements is made at low values of ψ relation for different combinations of ideal crystallographic textures and grain shapes are given. In all cases, a high ψ angle range exists where the d vs. sin2ψ relation in the low ψ angle range.

Residual stress measurement on TiN thin films by combing nanoindentation and average X-ray strain (AXS) method

2015 ◽  
Vol 280 ◽  
pp. 43-49 ◽  
Author(s):  
An-Ni Wang ◽  
Jia-Hong Huang ◽  
Haw-Wen Hsiao ◽  
Ge-Ping Yu ◽  
Haydn Chen
Keyword(s):  
Thin Films ◽  
Residual Stress ◽  
Stress Measurement ◽  
Residual Stress Measurement ◽  
X Ray ◽  
Tin Thin Films
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