scholarly journals Temporal Variations of Optical Emission Spectra in Microwave-Excited Plasma in Saturated Water Vapor under Reduced Pressure during Photoresist Removal

2021 ◽  
Vol 34 (5) ◽  
pp. 469-478
Author(s):  
Takuya Kitano ◽  
Takeshi Aizawa ◽  
Tatsuo Ishijima ◽  
Hiroaki Suzuki ◽  
Arufua Shiota ◽  
...  
2016 ◽  
Vol 29 (2) ◽  
pp. 127-134 ◽  
Author(s):  
A. V. Klimkin ◽  
A. N. Kuryak ◽  
Yu. N. Ponomarev ◽  
A. S. Kozlov ◽  
S. B. Malyshkin ◽  
...  

2009 ◽  
Vol 18 (2) ◽  
pp. 102-107
Author(s):  
Do-Yeob Kim ◽  
Min-Su Kim ◽  
Tae-Hoon Kim ◽  
Ghun-Sik Kim ◽  
Hyun-Young Choi ◽  
...  

2021 ◽  
pp. 117-121
Author(s):  
O.A. Nedybaliuk ◽  
T.A. Tereshchenko ◽  
I.I. Fedirchyk ◽  
P.V. Tyshchuk ◽  
V.P. Demchina

The article presents the results of the investigation of the reforming of ethanol into synthesis gas using a plasmacatalytic system with either AC or DC wide-aperture rotating gliding discharge. Current and voltage oscillograms of the wide-aperture rotating gliding discharge were measured. The time-dependence of the instantaneous power of the discharge in the air was built. The photographs of the discharge in the airflow and discharge during the ethanol reforming were compared. The optical emission spectra of the plasmas of the torches of AC and DC wide-aperture rotating gliding discharges were studied. The rotational and vibrational temperatures of the plasma torch in the reaction chamber were determined. The results of the gas-chromatography of the synthesis gas produced during the plasm-catalytic reforming of ethanol using either AC or DC rotating gliding discharge are presented.


1990 ◽  
Vol 39 (12) ◽  
pp. 1965
Author(s):  
ZHANG FANG-QING ◽  
ZHANG YA-FEI ◽  
YANG YING-HU ◽  
LI JING-QI ◽  
CHEN GUANG-HUA ◽  
...  

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