scholarly journals Optical Emission Spectra of Oxygen Plasma Produced by Radio-Frequency Plasma

2009 ◽  
Vol 18 (2) ◽  
pp. 102-107
Author(s):  
Do-Yeob Kim ◽  
Min-Su Kim ◽  
Tae-Hoon Kim ◽  
Ghun-Sik Kim ◽  
Hyun-Young Choi ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Oxygen Plasma ◽  
Emission Spectra ◽  
Optical Emission ◽  
Radio Frequency Plasma ◽  
Frequency Plasma ◽  
Optical Emission Spectra

scholarly journals Optical Emission Analysis of a Si(CH3)4-Argon Radio Frequency Plasma for SiC Films Deposition

1995 ◽  
Vol 05 (C5) ◽  
pp. C5-607-C5-614
Author(s):  
M. Andrieux ◽  
J. M. Badie ◽  
C. Bisch ◽  
M. Ducarroir ◽  
F. Teyssandier
Keyword(s):  
Radio Frequency ◽  
Optical Emission ◽  
Radio Frequency Plasma ◽  
Emission Analysis ◽  
Frequency Plasma ◽  
Sic Films

scholarly journals Characterising the Radio Frequency Plasma Source for Glow Discharge Optical Emission Spectroscopy

2002 ◽  
Vol 42 (Suppl) ◽  
pp. S101-S105 ◽  
Author(s):  
Richard Payling ◽  
Patrick Chapon ◽  
Olivier Bonnot ◽  
Philippe Belenguer ◽  
Philippe Guillot ◽  
...  
Keyword(s):  
Glow Discharge ◽  
Radio Frequency ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Plasma Source ◽  
Radio Frequency Plasma ◽  
Frequency Plasma
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