Hybrid Technology Combining Vacuum Electrospark Alloying, Cathodic Arc Evaporation, and Magnetron Sputtering for the Deposition of Hard Wear-Resistant Coatings

2019 ◽  
Vol 60 (5) ◽  
pp. 598-607 ◽  
Author(s):  
A. N. Sheveyko ◽  
K. A. Kuptsov ◽  
Ph. V. Kiryukhantsev-Korneev ◽  
E. A. Levashov ◽  
D. V. Shtansky
Author(s):  
A. N. Sheveyko ◽  
K. A. Kuptsov ◽  
Ph. V. Kiryukhantsev-Korneev ◽  
E. A. Levashov ◽  
D. V. Shtansky

The novel technology of multilayer coating deposition combining electric-spark alloying (ESA), pulsed arc evaporation (PAE), and magnetron sputtering (MS) in one vacuum process is presented. Layers can be deposited using a single electrode material at operating pressures from 0,1 Pa to atmospheric pressure. The lower ESA layer provides increased substrate toughness, perfect adhesion and a relatively high (up to 100 μm) coating thickness. The upper PAE or MS layer up to 10 μm in thickness provides high mechanical and tribological characteristics. The technology of double-layer PAE–ESA and MS–ESA coating deposition was tested on substrates made of structural and tool steels, titanium alloys using electrodes of cemented carbides (WC–Co, TiCNiAl) and carbon (low-porous graphite).


Author(s):  
Jörg Neidhardt ◽  
Zsolt Czigány ◽  
Bernhard Sartory ◽  
Richard Tessadri ◽  
Christian Mitterer

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