scholarly journals Development of a High-Vacuum Planar Magnetron Discharge.

Shinku ◽  
1992 ◽  
Vol 35 (2) ◽  
pp. 70-75 ◽  
Author(s):  
Tatsuo ASAMAKI ◽  
Tsutomu MIURA ◽  
Gen NAKAMURA ◽  
Koichi HOTATE ◽  
Shingo YONAIYAMA ◽  
...  
Keyword(s):  
High Vacuum ◽  
Magnetron Discharge ◽  
Planar Magnetron

Theory on High-Vacuum Planar Magnetron Discharge

1997 ◽  
Vol 36 (Part 1, No. 2) ◽  
pp. 787-791 ◽  
Author(s):  
Tsutomu Miura ◽  
Tatsuo Asakaki
Keyword(s):  
High Vacuum ◽  
Magnetron Discharge ◽  
Planar Magnetron

High‐vacuum planar magnetron discharge

1992 ◽  
Vol 10 (6) ◽  
pp. 3430-3433 ◽  
Author(s):  
T. Asamaki ◽  
T. Miura ◽  
G. Nakamura ◽  
K. Hotate ◽  
S. Yonaiyama ◽  
...  
Keyword(s):  
High Vacuum ◽  
Magnetron Discharge ◽  
Planar Magnetron

Copper Filling of Deep Sub-µm Through-Holes by High-Vacuum Planar Magnetron Sputtering Using Argon Gas with Added Nitrogen: Optimum Quantity of Nitrogen in Argon Gas

2006 ◽  
Vol 45 (2A) ◽  
pp. 736-738 ◽  
Author(s):  
Shigeru Saito ◽  
Yoshio Uhara ◽  
Takahide Uenosono ◽  
Jyunichi Nagata ◽  
Minemasa Oyama ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
High Vacuum ◽  
Argon Gas ◽  
Optimum Quantity ◽  
Planar Magnetron

Inductively-Coupled-Plasma-Assisted Planar Magnetron Discharge for Enhanced Ionization of Sputtered Atoms

1997 ◽  
Vol 36 (Part 1, No. 7B) ◽  
pp. 4568-4571 ◽  
Author(s):  
Yuichi Setsuhara ◽  
Masayoshi Kamai ◽  
Shoji Miyake ◽  
Jindrich Musil
Keyword(s):  
Inductively Coupled Plasma ◽  
Magnetron Discharge ◽  
Inductively Coupled ◽  
Planar Magnetron

scholarly journals Direct Measurement of Potential Distribution in Planar Magnetron Discharge by Probe Method.

Shinku ◽  
1995 ◽  
Vol 38 (10) ◽  
pp. 859-864 ◽  
Author(s):  
Tatsuo ASAMAKI ◽  
Tsutomu MIURA ◽  
Takahiro HENMI ◽  
Chiori KANEKO
Keyword(s):  
Direct Measurement ◽  
Potential Distribution ◽  
Probe Method ◽  
Magnetron Discharge ◽  
Planar Magnetron

scholarly journals Large-Scale Coaxial Magnetron Discharge Containing Magnets at Extremely High Vacuum and Its Application to Sputter Ion Pump.

Shinku ◽  
1995 ◽  
Vol 38 (1) ◽  
pp. 17-21 ◽  
Author(s):  
Tastuo ASAMAKI ◽  
Takemichi TANIGUCHI ◽  
Toshihiro FUKAYA ◽  
Atsuo KUDOH ◽  
Kenichi YAMAMOTO
Keyword(s):  
Large Scale ◽  
High Vacuum ◽  
Ion Pump ◽  
Magnetron Discharge
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