Effect of Negative Substrate Bias Voltage on the Nucleation and Growth of Cu Films during the Initial Stage of Ion Beam Deposition

2008 ◽  
Vol 14 (3) ◽  
pp. 381-384 ◽  
Author(s):  
Jae-Won Lim
Keyword(s):  
Bias Voltage ◽  
Ion Beam ◽  
Nucleation And Growth ◽  
Substrate Bias ◽  
Substrate Bias Voltage ◽  
Cu Films ◽  
Ion Beam Deposition ◽  
Initial Stage ◽  
Negative Substrate Bias ◽  
Beam Deposition

Effect of substrate bias voltage on the purity of Cu films deposited by non-mass separated ion beam deposition

2003 ◽  
Vol 434 (1-2) ◽  
pp. 30-33 ◽  
Author(s):  
J.-W. Lim ◽  
K. Mimura ◽  
K. Miyake ◽  
M. Yamashita ◽  
M. Isshiki
Keyword(s):  
Bias Voltage ◽  
Ion Beam ◽  
Substrate Bias ◽  
Substrate Bias Voltage ◽  
Cu Films ◽  
Ion Beam Deposition ◽  
Beam Deposition

Influence of substrate bias voltage on properties of Pt thin films deposited by non-mass separated ion beam deposition method

2009 ◽  
Vol 63 (26) ◽  
pp. 2181-2184 ◽  
Author(s):  
Joon Woo Bae ◽  
Jae-Won Lim ◽  
Kouji Mimura ◽  
Masahito Uchikoshi ◽  
Mitsuhiro Wada ◽  
...  
Keyword(s):  
Thin Films ◽  
Bias Voltage ◽  
Ion Beam ◽  
Substrate Bias ◽  
Deposition Method ◽  
Substrate Bias Voltage ◽  
Ion Beam Deposition ◽  
Influence Of Substrate ◽  
Beam Deposition

scholarly journals Influence of Substrate Bias Voltage on the Properties of Cu Thin Films by Sputter Type Ion Beam Deposition

2002 ◽  
Vol 43 (6) ◽  
pp. 1403-1408 ◽  
Author(s):  
Jae-Won Lim ◽  
Yukio Ishikawa ◽  
Kiyoshi Miyake ◽  
Mutsuo Yamashita ◽  
Minoru Isshiki
Keyword(s):  
Thin Films ◽  
Bias Voltage ◽  
Ion Beam ◽  
Substrate Bias ◽  
Substrate Bias Voltage ◽  
Ion Beam Deposition ◽  
Influence Of Substrate ◽  
Beam Deposition

Effect of Substrate Bias Voltage on the Thermal Stability of Cu/Ta/Si Structures Deposited by Ion Beam Deposition

2003 ◽  
Vol 42 (Part 1, No. 5A) ◽  
pp. 2780-2785 ◽  
Author(s):  
Jae-Won Lim ◽  
Kouji Mimura ◽  
Kiyoshi Miyake ◽  
Mutsuo Yamashita ◽  
Minoru Isshiki
Keyword(s):  
Thermal Stability ◽  
Bias Voltage ◽  
Ion Beam ◽  
Substrate Bias ◽  
Substrate Bias Voltage ◽  
Ion Beam Deposition ◽  
Thermal Stability Of ◽  
Beam Deposition

Improvement of Zr film purity by using a purified sputtering target and negative substrate bias voltage

2006 ◽  
Vol 201 (3-4) ◽  
pp. 1899-1901 ◽  
Author(s):  
J.-W. Lim ◽  
J.W. Bae ◽  
Y.F. Zhu ◽  
S. Lee ◽  
K. Mimura ◽  
...  
Keyword(s):  
Bias Voltage ◽  
Substrate Bias ◽  
Substrate Bias Voltage ◽  
Negative Substrate Bias
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