scholarly journals Deposition of TaN Film on Commercial Pure Titanium Disk by Modified Reactive Plasma Sputtering Technique

2022 ◽  
Vol 832 ◽  
pp. 142428
Author(s):  
Qian Wang ◽  
Jean-Sébastien Lecomte ◽  
Christophe Schuman ◽  
Laurent Peltier

1991 ◽  
Vol 107 (12) ◽  
pp. 887-893
Author(s):  
Shin-ya KOMATSU ◽  
Masahiko IKEDA ◽  
Tohru ODA ◽  
Kyoichiro ASAYAMA ◽  
Takashi SUGIMOTO ◽  
...  

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