Method to Solve Assembly Misalignment of Two-Reverse System Based on Vector Wave Aberration Theory

2019 ◽  
Vol 39 (7) ◽  
pp. 0722002
Author(s):  
郭攀 Pan Guo ◽  
周军 Jun Zhou ◽  
丁晓宇 Xiaoyu Ding ◽  
刘检华 Jianhua Liu ◽  
盛忠 Zhong Sheng
2020 ◽  
Vol 41 (5) ◽  
pp. 904-910
Author(s):  
YU Chenghao ◽  
◽  
LYU Lijun

Author(s):  
T. Yanaka ◽  
K. Shirota

It is significant to note field aberrations (chromatic field aberration, coma, astigmatism and blurring due to curvature of field, defined by Glaser's aberration theory relative to the Blenden Freien System) of the objective lens in connection with the following three points of view; field aberrations increase as the resolution of the axial point improves by increasing the lens excitation (k2) and decreasing the half width value (d) of the axial lens field distribution; when one or all of the imaging lenses have axial imperfections such as beam deflection in image space by the asymmetrical magnetic leakage flux, the apparent axial point has field aberrations which prevent the theoretical resolution limit from being obtained.


Author(s):  
Hannes Lichte

Generally, the electron object wave o(r) is modulated both in amplitude and phase. In the image plane of an ideal imaging system we would expect to find an image wave b(r) that is modulated in exactly the same way, i. e. b(r) =o(r). If, however, there are aberrations, the image wave instead reads as b(r) =o(r) * FT(WTF) i. e. the convolution of the object wave with the Fourier transform of the wave transfer function WTF . Taking into account chromatic aberration, illumination divergence and the wave aberration of the objective lens, one finds WTF(R) = Echrom(R)Ediv(R).exp(iX(R)) . The envelope functions Echrom(R) and Ediv(R) damp the image wave, whereas the effect of the wave aberration X(R) is to disorder amplitude and phase according to real and imaginary part of exp(iX(R)) , as is schematically sketched in fig. 1.Since in ordinary electron microscopy only the amplitude of the image wave can be recorded by the intensity of the image, the wave aberration has to be chosen such that the object component of interest (phase or amplitude) is directed into the image amplitude. Using an aberration free objective lens, for X=0 one sees the object amplitude, for X= π/2 (“Zernike phase contrast”) the object phase. For a real objective lens, however, the wave aberration is given by X(R) = 2π (.25 Csλ3R4 + 0.5ΔzλR2), Cs meaning the coefficient of spherical aberration and Δz defocusing. Consequently, the transfer functions sin X(R) and cos(X(R)) strongly depend on R such that amplitude and phase of the image wave represent only fragments of the object which, fortunately, supplement each other. However, recording only the amplitude gives rise to the fundamental problems, restricting resolution and interpretability of ordinary electron images:


2010 ◽  
pp. 101-135
Author(s):  
Rudolf Kingslake ◽  
R. Barry Johnson
Keyword(s):  

2016 ◽  
Vol 370 ◽  
pp. 68-74 ◽  
Author(s):  
Xin Gao ◽  
Xinzhu Sang ◽  
Xunbo Yu ◽  
Duo Chen ◽  
Zhidong Chen ◽  
...  

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