scholarly journals Detecting Digital Micromirror Device Malfunctions in High-throughput Maskless Lithography

2013 ◽  
Vol 17 (6) ◽  
pp. 513-517 ◽  
Author(s):  
Minwook Kang ◽  
Dong Won Kang ◽  
Jae W. Hahn
Keyword(s):  
High Throughput ◽  
Maskless Lithography ◽  
Digital Micromirror Device

Demonstration of real-time pattern correction for high-throughput maskless lithography

2011 ◽  
Author(s):  
E. A. Hakkennes ◽  
A. D. Wiersma ◽  
M. Hoving ◽  
N. Venema ◽  
S. Woutersen ◽  
...  
Keyword(s):  
Real Time ◽  
High Throughput ◽  
Maskless Lithography ◽  
Time Pattern

A high-speed exposure method for digital micromirror device based scanning maskless lithography system

Optik ◽  
2019 ◽  
Vol 185 ◽  
pp. 1036-1044 ◽  
Author(s):  
Chao Peng ◽  
Zezhou Zhang ◽  
Jianxiao Zou ◽  
Wenming Chi
Keyword(s):  
High Speed ◽  
Maskless Lithography ◽  
Digital Micromirror Device ◽  
Exposure Method ◽  
Lithography System

Patterning of SU-8 resist with digital micromirror device (DMD) maskless lithography

2009 ◽  
Author(s):  
Tao Wang ◽  
Marzia Quaglio ◽  
Fabrizio Pirri ◽  
Yang-Chun Cheng ◽  
David Busacker ◽  
...  
Keyword(s):  
Maskless Lithography ◽  
Digital Micromirror Device

MAPPER: high throughput maskless lithography

2008 ◽  
Author(s):  
E. Slot ◽  
M. J. Wieland ◽  
G. de Boer ◽  
P. Kruit ◽  
G. F. ten Berge ◽  
...  
Keyword(s):  
High Throughput ◽  
Maskless Lithography

MAPPER: high-throughput maskless lithography

2009 ◽  
Author(s):  
M. J. Wieland ◽  
G. de Boer ◽  
G. F. ten Berge ◽  
R. Jager ◽  
T. van de Peut ◽  
...  
Keyword(s):  
High Throughput ◽  
Maskless Lithography

High-throughput hybrid optical maskless lithography: all-optical 32-nm node imaging

2005 ◽  
Author(s):  
M. Fritze ◽  
B. Tyrrell ◽  
T. Fedynyshyn ◽  
M. Rothschild ◽  
P. Brooker
Keyword(s):  
High Throughput ◽  
Maskless Lithography ◽  
All Optical
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