Research of Influence Thickness of Nanocrystalline VOx Films on their Electrical Properties
2013 ◽
Vol 475-476
◽
pp. 1266-1269
Keyword(s):
Nanocrystalline VOx thin films were manufactured by using pulsed laser deposition. The influence of deposition time on electrical parameters of VOx thin films were researched. It was determined that changes in deposition time lead to significant changes in properties of thin films, including resistivity in the range from 5 Ohm·cm to 70 Ohm·cm. The possibility of controlling physical properties of VOx nanocrystalline films obtained in the experiments has been shown.
Keyword(s):
2021 ◽
Vol 1095
(1)
◽
pp. 012009
Keyword(s):
Keyword(s):
2019 ◽
Vol 45
(10)
◽
pp. 13518-13522
◽
Keyword(s):
2015 ◽
Vol 41
◽
pp. S202-S205
◽
2008 ◽
Vol 43
(6)
◽
pp. 1376-1383
◽
Keyword(s):
2018 ◽
Vol 44
(6)
◽
pp. 6514-6519
◽
Keyword(s):
2012 ◽
Vol 258
(7)
◽
pp. 2674-2678
◽
Keyword(s):