Ferroelectric and Ferroelastic Domain Related Formation and Influential Mechanisms of Vapor Deposited Piezoelectric Thin Films

Compared to the bulk piezoelectric materials counterpart, piezoelectric thin films (PTFs) possess advantages of smaller size, lower power consumption, better sensitivity, and have broad application in advanced micro-electro-mechanical system (MEMS) devices. However, the performance of MEMS transducers and actuators are largely limited by PTFs piezoelectric properties. In this review, we focus on understanding structure-property relationship of vapor deposited PTFs, with emphasis on the effect of strain energy and electrostatic energy in thin films, especially, energy relaxation induced misfit dislocation and ferroelectric (FS) and ferroelastic (FC) domain formation mechanisms. We then discuss the microstructure of these domains and their influential mechanisms on piezoelectric properties, as well as the domain engineering strategies (i.e., internal and external stimuli). This review will motivate further experimental, theoretical, and simulation studies on FS and FC domain engineering in PTFs.

Growth and Crystallization of SiO2/GeO2 Thin Films on Si(100) Substrates

The growth of α-quartz-based piezoelectric thin films opens the door to higher-frequency electromechanical devices than those available through top-down approaches. We report on the growth of SiO2/GeO2 thin films by pulsed laser deposition and their subsequent crystallization. By introducing a devitrifying agent uniformly within the film, we are able to obtain the α-quartz phase in the form of platelets with lateral sizes above 100 μm at accessible temperatures. Films containing different amounts of devitrifying agent are investigated, and their crystallinity is ascertained with X-ray diffraction and electron back-scatter diffraction. Our work highlights the difficulty in crystallization when competing phases arise that have markedly different crystalline orientation.

Flexible Piezoelectric Thin Films for Podiatric Sensors with Wireless Communication

For reasons of availability and cost, patients are sent home increasingly early, with limited follow-up due to the complexity and size of medical devices. In this context, researchers from IETR and MIPS laboratories are working on a device which should monitor the progress of a patient, in order to detect early the aggravation of a disease such as Chronic Obstructive Pulmonary Disease (COPD) or diabetes with walking disorders. The device is based on flexible piezoelectric thin films (3 µm thick) that can be used as podiatric sensors and have been developed by the IETR laboratory. The originality of this work lies both in the approach to the design of the gait-monitoring device—because it was carried out directly in consultation with a doctor from the University Hospital of Nantes and a podiatrist—and in the portability of the device, which should eventually allow the follow-up of a patient at home. For this study, the flexible piezoelectric sensors have been elaborated using a Chemical Solution Deposition (CSD) process and a commercial aluminum (Al) foil as substrate. In order to increase the flexibility of sensors and to aid its insertion in a shoe, piezoelectric films have been encapsulated by lamination into polyethylene terephthalate (PET, 150 μm). In this paper, the elaboration and characterization of flexible piezoelectric sensors, analog-to-digital converter and wireless communication protocol used for data transmission are presented.

Flexible and Lead-free BCZT Thin Film Nanogenerator for Biocompatible Energy Harvesting

High-performance piezoelectric thin films generally contain toxic lead that limits the application scenarios especially on wearable and medical devices. Alternative lead-free piezoelectric materials such as Ba0.85Ca0.15-Zr0.1Ti0.9O3 (BCZT) have been proved...