Fabrication of Aspheric Micro Lens Array by Slow Tool Servo
2009 ◽
Vol 76-78
◽
pp. 479-484
◽
Keyword(s):
Owing to the fast development in photonic, telecommunication, and opto-electronic industries, the demand for various micro-lens arrays is rapidly growing. The slow tool servo technique was applied on an ultra-precision diamond turning machine in the present research in conjunction with the tool path generating algorithm for aspheric micro-lens array fabrication. An aspheric lens array of 100% filling factor was successfully produced and the form accuracy and surface roughness were better than 0.15μm and 3nm for all the obtained lenses.
2009 ◽
Vol 407-408
◽
pp. 380-383
Keyword(s):
Keyword(s):
2009 ◽
Vol 3
(3)
◽
pp. 227
◽
Keyword(s):
Keyword(s):
2018 ◽
Vol 96
(5-8)
◽
pp. 2463-2469
◽
Keyword(s):
2015 ◽
Vol 81
(10)
◽
pp. 951-956
◽
2008 ◽
Vol 201
(1-3)
◽
pp. 585-589
◽
Keyword(s):
Keyword(s):
Keyword(s):