Design of Micromachining System Based on Nanosecond Pulsed Laser

2015 ◽  
Vol 645-646 ◽  
pp. 1049-1053
Author(s):  
Dong Xu ◽  
Yao Yao ◽  
Xing Fu ◽  
Chao Wang

In recent years, pulsed laser processing technology is widely used in MEMS device manufacturing, aerospace technology, precision instrument manufacturing and circuit board processing. According to the characteristics of nanosecond laser, this paper designs a novel nanosecond pulsed laser micromachining system with PMAC card as its core unit. The system can achieve automation control of laser parameters and movement pattern of motion system by software, which can easily realize automatic processing of point, line, and plane structure in micron scale. In this paper, several groups of experiments are taken to test the reliability and accuracy of the machining system and find the group to obtain the best processing result.

Author(s):  
Yeqing Wang ◽  
Daniel Diaz ◽  
David W. Hahn

This research presents laser ablation characteristics of an aluminum alloy after nanosecond pulsed laser ablation (PLA) with a 1064 nm Nd:YAG laser. White light interferometry and scanning electron microscopy were used to establish relationships between laser ablation characteristics and the number of pulses at different beam energies. Laser ablation features studied in this research are crater profiles, radii and depth, and extent of surface damage. An extensive damaged area around the laser ablation crater was found and is believed to be produced by the laser-induced plasma generated during PLA. Spectroscopic analysis showed that there is a correlation between the plasma formation threshold and the initiation of the plasma-affected area, and laser ablation at different angles of incidence between the beam and the sample showed a correlation between the plasma shape and the shape of the damaged area around the ablation crater. However, the variables influencing the occurrence of the plasma-affected and the extent of plasma-induced damage are not yet fully recognized and understood.


2008 ◽  
Author(s):  
Takeji Arai ◽  
Noritaka Asano ◽  
Akihiko Minami ◽  
Hideaki Kusano

2021 ◽  
Vol 139 ◽  
pp. 106998
Author(s):  
Zhichao Li ◽  
Donghe Zhang ◽  
Xuan Su ◽  
Shirui Yang ◽  
Jie Xu ◽  
...  

2015 ◽  
Vol 23 (4) ◽  
pp. 4233 ◽  
Author(s):  
Xiong Wang ◽  
Xiaoxi Jin ◽  
Pu Zhou ◽  
Xiaolin Wang ◽  
Hu Xiao ◽  
...  

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