Lithographic mask defects mitigation on a multimode interference structure
2020 ◽
Vol 53
(3)
◽
pp. 1-11
2014 ◽
Vol 53
(22)
◽
pp. 5024
◽
Jiu-sheng Li
◽
Han Liu
◽
Le Zhang
Y. Matsumoto
◽
S. Taue
◽
K. Tsuruta
◽
H. Fukano
Jong-Kyun Hong
◽
Jong-In Jung
◽
Jung-Ha Kim
◽
Sang-Sun Lee
2014 ◽
Vol 39
(22)
◽
pp. 6521
◽
Qiang Wu
◽
Jinhui Yuan
◽
Chongxiu Yu
◽
Xinzhu Sang
◽
Lipeng Sun
◽
...
Qian Wang
◽
Gerald Farrell
◽
Agus Muhamad Hatta
2012 ◽
Vol 51
◽
pp. 04DG14
◽
Shuji Taue
◽
Yoshiki Matsumoto
◽
Hideki Fukano
◽
Kenji Tsuruta
2014 ◽
Vol 53
(4S)
◽
pp. 04EG05
◽
Hideki Fukano
◽
Takuya Hashimoto
◽
Shuji Taue
2019 ◽
Vol 56
(5)
◽
pp. 051301
孟方 Meng Fang
◽
王亚新 Wang Yaxin
◽
毛强 Mao Qiang
◽
唐雄贵 Tang Xionggui
2012 ◽
Vol 51
(4S)
◽
pp. 04DG14
◽
Shuji Taue
◽
Yoshiki Matsumoto
◽
Hideki Fukano
◽
Kenji Tsuruta
2016 ◽
Vol 16
(2)
◽
pp. 331-335
◽
Yaofei Chen
◽
Yan Wang
◽
Ruoyu Chen
◽
Wenkai Yang
◽
Hao Liu
◽
...