scholarly journals Lithographic mask defects mitigation on a multimode interference structure

2020 ◽  
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Jinhui Yuan ◽  
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Lipeng Sun ◽  
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2019 ◽  
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孟方 Meng Fang ◽  
王亚新 Wang Yaxin ◽  
毛强 Mao Qiang ◽  
唐雄贵 Tang Xionggui

2016 ◽  
Vol 16 (2) ◽  
pp. 331-335 ◽  
Author(s):  
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Yan Wang ◽  
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Wenkai Yang ◽  
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