Distributions of hafnia and titania cores in EUV metal resists evaluated by scanning transmission electron microscopy and electron energy loss spectroscopy

2016 ◽  
Vol 9 (11) ◽  
pp. 111801 ◽  
Author(s):  
Minoru Toriumi ◽  
Yuta Sato ◽  
Masanori Koshino ◽  
Kazu Suenaga ◽  
Toshiro Itani
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Energy Loss ◽  
Electron Energy ◽  
Electron Energy Loss Spectroscopy ◽  
Scanning Transmission Electron Microscopy ◽  
Scanning Transmission Electron ◽  
Transmission Electron ◽  
Scanning Transmission ◽  
Electron Energy Loss

Analysis of AlxGa1-xN nanowires through simulated methods of scanning transmission electron microscopy and electron energy-loss spectroscopy

2013 ◽  
Vol 6 (1) ◽  
Author(s):  
R. Kumar ◽  
P.J. Phillips ◽  
R.F. Klie
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Energy Loss ◽  
Electron Energy ◽  
Electron Energy Loss Spectroscopy ◽  
Scanning Transmission Electron Microscopy ◽  
Scanning Transmission Electron ◽  
Transmission Electron ◽  
Scanning Transmission ◽  
Electron Energy Loss

AlxGa1-xN nanowires have promising applications in ultraviolet light emitting diodes (LEDs). However, these nanowires are not typical p-n junction semiconductors, but rather rely on varying concentrations of Al versus Ga to produce electron hole pairs. More information on the atomic structure is needed to better understand the properties of these nanowires. In this study, AlxGa1-xN nanowires were imaged using scanning transmission electron microscopy (STEM) and compared to computer simulated STEM images to obtain physical information on the nanowires. Electron energy-loss spectroscopy (EELS) and FEFF9 computer simulations were also performed to better understand the structural and chemical properties of the nanowires. Results from these simulations showed that changes in the chemical ordering of the nanowires were responsible for changes in intensity and resolution in the images. These intensity and resolution trends were not a result of interface effects. This will help to further characterize nanowires in the future.

scholarly journals Electron Energy Loss Spectroscopy for Aqueous in Situ Scanning Transmission Electron Microscopy

2011 ◽  
Vol 17 (S2) ◽  
pp. 778-779 ◽  
Author(s):  
K Jungjohann ◽  
J Evans ◽  
I Arslan ◽  
N Browning
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Energy Loss ◽  
Electron Energy ◽  
Electron Energy Loss Spectroscopy ◽  
Scanning Transmission Electron Microscopy ◽  
Transmission Electron ◽  
Scanning Transmission ◽  
Electron Energy Loss

Extended abstract of a paper presented at Microscopy and Microanalysis 2011 in Nashville, Tennessee, USA, August 7–August 11, 2011.

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