Low-Temperature Synthesis of Single-Walled Carbon Nanotubes in a High Vacuum Using Pt Catalyst in Alcohol Gas Source Method

In this work, we present a parametric study on the low temperature synthesis of single-walled carbon nanotubes (SWNTs) in an inductively coupled plasma (ICP) CVD system using dry bi-layered catalytic thin-films (Fe/Al and Ni/Al, deposited by electron-beam evaporation method) as the catalysts. With a low substrate temperature of 550 °C and above, SWNTs were successfully synthesized on both catalysts, as revealed from the characteristic peaks of SWNTs in the micro-Raman spectra. By the reduction of plasma power and the shortening of the process times, the lowest synthesis temperature of SWNTs achieved in our system was approached to 500 °C on Ni/Al catalysts; on the other hands, the lowest temperature for Fe/Al catalysts was 550 °C. Our results suggest that as compared with Fe/Al, Ni/Al is more favorable for plasma-enhanced CVD (PECVD) synthesis of SWNTs at low temperatures. This work can be used for further improvements and better understanding on the production processes of SWNTs by PECVD methods.

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Low-temperature synthesis of high-purity single-walled carbon nanotubes from alcohol

Chemical Physics Letters ◽

10.1016/s0009-2614(02)00838-2 ◽

2002 ◽

Vol 360 (3-4) ◽

pp. 229-234 ◽

Cited By ~ 763

Author(s):

Shigeo Maruyama ◽

Ryosuke Kojima ◽

Yuhei Miyauchi ◽

Shohei Chiashi ◽

Masamichi Kohno

Keyword(s):

Carbon Nanotubes ◽

Low Temperature ◽

High Purity ◽

Single Walled Carbon Nanotubes ◽

Low Temperature Synthesis ◽

Temperature Synthesis ◽

Single Walled Carbon ◽

Walled Carbon Nanotubes

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Low-temperature synthesis of single-walled carbon nanotubes with Co catalysts via alcohol catalytic chemical vapor deposition under high vacuum

Materials Today Communications ◽

10.1016/j.mtcomm.2018.12.018 ◽

2019 ◽

Vol 19 ◽

pp. 51-55 ◽

Cited By ~ 3

Author(s):

Takuya Okada ◽

Takahiro Saida ◽

Shigeya Naritsuka ◽

Takahiro Maruyama

Keyword(s):

Carbon Nanotubes ◽

Low Temperature ◽

Vapor Deposition ◽

High Vacuum ◽

Chemical Vapor ◽

Single Walled Carbon Nanotubes ◽

Low Temperature Synthesis ◽

Temperature Synthesis ◽

Co Catalysts ◽

Walled Carbon Nanotubes

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Low Temperature Synthesis of Extremely Dense and Vertically Aligned Single-Walled Carbon Nanotubes

Japanese Journal of Applied Physics ◽

10.1143/jjap.44.1558 ◽

2005 ◽

Vol 44 (4A) ◽

pp. 1558-1561 ◽

Cited By ~ 113

Author(s):

Guofang Zhong ◽

Takayuki Iwasaki ◽

Kotaro Honda ◽

Yukio Furukawa ◽

Iwao Ohdomari ◽

...

Keyword(s):

Carbon Nanotubes ◽

Low Temperature ◽

Single Walled Carbon Nanotubes ◽

Low Temperature Synthesis ◽

Temperature Synthesis ◽

Single Walled Carbon ◽

Vertically Aligned ◽

Walled Carbon Nanotubes

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Low Temperature Growth of Single-Walled Carbon Nanotubes from Pt Catalysts under Low Ethanol Pressure by Alcohol Gas Source Method

Journal of Nanotechnology ◽

10.1155/2012/690304 ◽

2012 ◽

Vol 2012 ◽

pp. 1-5 ◽

Cited By ~ 6

Author(s):

Hiroki Kondo ◽

Naoya Fukuoka ◽

Takahiro Maruyama

Keyword(s):

Carbon Nanotubes ◽

High Vacuum ◽

Single Walled Carbon Nanotubes ◽

Average Diameter ◽

Diameter Distribution ◽

Pt Catalysts ◽

Single Walled Carbon ◽

Source Method ◽

Gas Source ◽

Walled Carbon Nanotubes

Growth of single-walled carbon nanotubes (SWNTs) was carried out on SiO2/Si substrates with Pt catalysts at 400, 450, and 700°C under various ethanol pressures using an alcohol gas source method in a high vacuum, and the grown SWNTs were characterized by scanning electron microscopy (SEM) and Raman spectroscopy. Irrespective of the growth temperature, both G band and RBM peaks were observed in the Raman spectra under the optimal ethanol pressure (~1×10−3Pa), indicating that SWNTs grew below 450°C from Pt. At 400°C, both average diameter and diameter distribution were drastically reduced, and those were fairly smaller and narrower, compared to those for SWNTs grown with Co.

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