Meniscus-force-mediated layer transfer technique using single-crystalline silicon films with midair cavity: Application to fabrication of CMOS transistors on plastic substrates

Kohei Sakaike; Muneki Akazawa; Akitoshi Nakagawa; Seiichiro Higashi

doi:10.7567/jjap.54.04da08

Meniscus-force-mediated layer transfer technique using single-crystalline silicon films with midair cavity: Application to fabrication of CMOS transistors on plastic substrates

Japanese Journal of Applied Physics ◽

10.7567/jjap.54.04da08 ◽

2015 ◽

Vol 54 (4S) ◽

pp. 04DA08 ◽

Cited By ~ 2

Author(s):

Kohei Sakaike ◽

Muneki Akazawa ◽

Akitoshi Nakagawa ◽

Seiichiro Higashi

Keyword(s):

Crystalline Silicon ◽

Silicon Films ◽

Single Crystalline Silicon ◽

Layer Transfer ◽

Single Crystalline ◽

Plastic Substrates ◽

Meniscus Force ◽

Cmos Transistors

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Fabrication of N-channel single crystalline silicon (100) thin-film transistors on glass substrate by meniscus force-mediated layer transfer technique

Japanese Journal of Applied Physics ◽

10.7567/jjap.53.108002 ◽

2014 ◽

Vol 53 (10) ◽

pp. 108002

Author(s):

Muneki Akazawa ◽

Kohei Sakaike ◽

Shogo Nakamura ◽

Seiichiro Higashi

Keyword(s):

Thin Film ◽

Glass Substrate ◽

Thin Film Transistors ◽

Crystalline Silicon ◽

Single Crystalline Silicon ◽

Layer Transfer ◽

Single Crystalline ◽

Meniscus Force

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(Invited) Single-Crystalline Silicon CMOS Fabrication on PET By Meniscus Force Mediated Layer Transfer Technique

ECS Meeting Abstracts ◽

10.1149/ma2019-02/25/1177 ◽

2019 ◽

Keyword(s):

Crystalline Silicon ◽

Single Crystalline Silicon ◽

Layer Transfer ◽

Single Crystalline ◽

Meniscus Force ◽

Silicon Cmos

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Formation of Single Crystalline Silicon with Midair Cavity for Meniscus Force-Mediated Local Layer Transfer and Fabrication of High-Performance MOSFETs on Insulator

10.7567/ssdm.2015.ps-1-15 ◽

2015 ◽

Author(s):

M. Akazawa ◽

S. Takeshima ◽

A. Nakagawa ◽

K. Hiramatsu ◽

S. Higashi

Keyword(s):

High Performance ◽

Crystalline Silicon ◽

Single Crystalline Silicon ◽

Layer Transfer ◽

Single Crystalline ◽

Meniscus Force

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In-plane-gate flexible single-crystalline silicon thin-film transistors with high-k gate dielectrics on plastic substrates

AIP Advances ◽

10.1063/1.5045521 ◽

2019 ◽

Vol 9 (1) ◽

pp. 015111 ◽

Cited By ~ 1

Author(s):

Yibo Zhang ◽

Shihui Yu ◽

Kuibo Lan ◽

Lingxia Li ◽

Guoxuan Qin

Keyword(s):

Thin Film ◽

Thin Film Transistors ◽

Crystalline Silicon ◽

Gate Dielectrics ◽

Single Crystalline Silicon ◽

Silicon Thin Film ◽

Single Crystalline ◽

Plastic Substrates ◽

High K

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Growth of single-crystalline silicon films on insulating substrates

Acta Physica Hungarica ◽

10.1007/bf03155904 ◽

1987 ◽

Vol 61 (2) ◽

pp. 251-254

Author(s):

W. Scharff ◽

K. Hoeppner

Keyword(s):

Crystalline Silicon ◽

Silicon Films ◽

Single Crystalline Silicon ◽

Single Crystalline ◽

Insulating Substrates

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Complementary Logic Gates and Ring Oscillators on Plastic Substrates by Use of Printed Ribbons of Single-Crystalline Silicon

IEEE Electron Device Letters ◽

10.1109/led.2007.910770 ◽

2008 ◽

Vol 29 (1) ◽

pp. 73-76 ◽

Cited By ~ 74

Author(s):

Dae-Hyeong Kim ◽

Jong-Hyun Ahn ◽

Hoon-Sik Kim ◽

Keon Jae Lee ◽

Tae-Ho Kim ◽

...

Keyword(s):

Crystalline Silicon ◽

Logic Gates ◽

Ring Oscillators ◽

Single Crystalline Silicon ◽

Single Crystalline ◽

Plastic Substrates

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The fabrication and characterization of flexible single-crystalline silicon and germanium p-intrinsic-n photodetectors on plastic substrates

Applied Physics Letters ◽

10.1063/1.4989685 ◽

2017 ◽

Vol 110 (25) ◽

pp. 253104 ◽

Cited By ~ 10

Author(s):

Mengjiao Dang ◽

Hao-Chih Yuan ◽

Zhenqiang Ma ◽

Jianguo Ma ◽

Guoxuan Qin

Keyword(s):

Crystalline Silicon ◽

Single Crystalline Silicon ◽

Single Crystalline ◽

Plastic Substrates ◽

Fabrication And Characterization ◽

Silicon And Germanium

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Bendable integrated circuits on plastic substrates by use of printed ribbons of single-crystalline silicon

Applied Physics Letters ◽

10.1063/1.2742294 ◽

2007 ◽

Vol 90 (21) ◽

pp. 213501 ◽

Cited By ~ 61

Author(s):

Jong-Hyun Ahn ◽

Hoon-Sik Kim ◽

Etienne Menard ◽

Keon Jae Lee ◽

Zhengtao Zhu ◽

...

Keyword(s):

Integrated Circuits ◽

Crystalline Silicon ◽

Single Crystalline Silicon ◽

Single Crystalline ◽

Plastic Substrates

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Single-Crystalline Silicon-Based Heterojunction Photodiode Arrays on Flexible Plastic Substrates

IEEE Transactions on Electron Devices ◽

10.1109/ted.2011.2162241 ◽

2011 ◽

Vol 58 (10) ◽

pp. 3329-3334 ◽

Cited By ~ 3

Author(s):

Sangwook Lee ◽

Juree Hong ◽

Ja Hoon Koo ◽

Seulah Lee ◽

Kwanghyun Lee ◽

...

Keyword(s):

Crystalline Silicon ◽

Single Crystalline Silicon ◽

Single Crystalline ◽

Plastic Substrates ◽

Photodiode Arrays ◽

Silicon Based

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Local transfer of single-crystalline silicon (100) layer by meniscus force and its application to high-performance MOSFET fabrication on glass substrate

2013 IEEE International Electron Devices Meeting ◽

10.1109/iedm.2013.6724612 ◽

2013 ◽

Author(s):

M. Akazawa ◽

K. Sakaike ◽

S. Nakamura ◽

S. Higashi

Keyword(s):

Glass Substrate ◽

High Performance ◽

Crystalline Silicon ◽

Single Crystalline Silicon ◽

Single Crystalline ◽

Meniscus Force ◽

Local Transfer

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