Reliability investigation of high-k/metal gate in nMOSFETs by three-dimensional kinetic Monte-Carlo simulation with multiple trap interactions
2016 ◽
Vol 55
(4S)
◽
pp. 04ED15
◽
Keyword(s):
2006 ◽
Vol 294
(1)
◽
pp. 46-52
◽
2009 ◽
2020 ◽
Vol 1695
◽
pp. 012016
Keyword(s):
2005 ◽
Vol 38
(23)
◽
pp. 4202-4209
◽
Keyword(s):