Integration of ultra shallow junctions in PVD TaN nMOS transistors with Flash Lamp Annealing
2004 ◽
Vol 114-115
◽
pp. 358-361
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Keyword(s):
2004 ◽
Vol 22
(1)
◽
pp. 306
◽
2013 ◽
Vol 2
(5)
◽
pp. P195-P204
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