ultra shallow junctions
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Micromachines ◽  
2020 ◽  
Vol 11 (9) ◽  
pp. 812
Author(s):  
Dung-Sheng Tsai ◽  
Ping-Yu Chiang ◽  
Meng-Lin Tsai ◽  
Wei-Chen Tu ◽  
Chi Chen ◽  
...  

This work demonstrates a self-powered and broadband photodetector using a heterojunction formed by camphor-based chemical vaper deposition (CVD) bilayer graphene on p-Si substrates. Here, graphene/p-Si heterostructures and graphene layers serve as ultra-shallow junctions for UV absorption and zero bandgap junction materials (<Si bandgap (1.1 eV)) for long-wave near-infrared (LWNIR) absorption, respectively. According to the Raman spectra and large-area (16 × 16 μm2) Raman mapping, a low-defect, >95% coverage bilayer and high-uniformity graphene were successfully obtained by camphor-based CVD processes. Furthermore, the carrier mobility of the camphor-based CVD bilayer graphene at room temperature is 1.8 × 103 cm2/V·s. Due to the incorporation of camphor-based CVD graphene, the graphene/p-Si Schottky junctions show a good rectification property (rectification ratio of ~110 at ± 2 V) and good performance as a self-powered (under zero bias) photodetector from UV to LWNIR. The photocurrent to dark current ratio (PDCR) value is up to 230 at 0 V under white light illumination, and the detectivity (D*) is 8 × 1012 cmHz1/2/W at 560 nm. Furthermore, the photodetector (PD) response/decay time (i.e., rise/fall time) is ~118/120 μs. These results support the camphor-based CVD bilayer graphene/Si Schottky PDs for use in self-powered and ultra-broadband light detection in the future.


2019 ◽  
Vol 3 (2) ◽  
pp. 57-65
Author(s):  
Hendriansyah Sauddin ◽  
Yuichiro Sasaki ◽  
Hiroyuki Ito ◽  
Bunji Mizuno ◽  
Parhat Ahmet ◽  
...  

2019 ◽  
Vol 3 (2) ◽  
pp. 105-112
Author(s):  
Susan B. Felch ◽  
Annelies Falepin ◽  
Simone Severi ◽  
Emmanuel Augendre ◽  
Taiji Noda ◽  
...  

2019 ◽  
Vol 496 ◽  
pp. 143721 ◽  
Author(s):  
P. Tejedor ◽  
M. Drescher ◽  
L. Vázquez ◽  
L. Wilde

2014 ◽  
Author(s):  
Andrey V. Miakonkikh ◽  
Aleksander E. Rogozhin ◽  
Valeriy I. Rudakov ◽  
Konstantin V. Rudenko ◽  
Vladimir F. Lukichev

2014 ◽  
Vol 101 ◽  
pp. 131-136 ◽  
Author(s):  
M. Moras ◽  
J. Martin-Martinez ◽  
R. Rodriguez ◽  
M. Nafria ◽  
X. Aymerich ◽  
...  

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