Electric Characterization of Carbon Nanotubes Grown at Low Temperature by Remote Plasma Chemical Vapor Deposition for LSI Interconnects

2009 ◽  
Author(s):  
M. Iizuka ◽  
D. Yokoyama ◽  
K. Ishimaru ◽  
I. Yuitho ◽  
T. Takeuchi ◽  
...  
Keyword(s):  
Carbon Nanotubes ◽  
Chemical Vapor Deposition ◽  
Low Temperature ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Remote Plasma ◽  
Plasma Chemical ◽  
Plasma Chemical Vapor Deposition

Electrical characterization of graphene films synthesized by low-temperature microwave plasma chemical vapor deposition

2013 ◽  
Vol 103 (15) ◽  
pp. 153106 ◽  
Author(s):  
Yuki Okigawa ◽  
Kazuo Tsugawa ◽  
Takatoshi Yamada ◽  
Masatou Ishihara ◽  
Masataka Hasegawa
Keyword(s):  
Chemical Vapor Deposition ◽  
Low Temperature ◽  
Vapor Deposition ◽  
Microwave Plasma ◽  
Electrical Characterization ◽  
Chemical Vapor ◽  
Plasma Chemical ◽  
Plasma Chemical Vapor Deposition ◽  
Graphene Films

Characterization of Tensile Strained Si1-yCyAlloy Grown by Photo- and Plasma Chemical Vapor Deposition at Very Low Temperature

2001 ◽  
Vol 40 (Part 1, No. 7) ◽  
pp. 4440-4444 ◽  
Author(s):  
Katsuya Abe ◽  
Shuhei Yagi ◽  
Takashi Okabayashi ◽  
Akira Yamada ◽  
Makoto Konagai
Keyword(s):  
Chemical Vapor Deposition ◽  
Low Temperature ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Plasma Chemical ◽  
Plasma Chemical Vapor Deposition ◽  
Very Low Temperature

Remote Plasma Chemical Vapor Deposition of Carbon Nanotubes and Analysis of Plasma Effect

2011 ◽  
Vol 39 (11) ◽  
pp. 3133-3139 ◽  
Author(s):  
Yushi Fukuda ◽  
Junichi Takayama ◽  
Norichika Asaoka ◽  
Yoshiyuki Suda ◽  
Hirotake Sugawara ◽  
...  
Keyword(s):  
Carbon Nanotubes ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Remote Plasma ◽  
Plasma Chemical ◽  
Plasma Chemical Vapor Deposition ◽  
Plasma Effect
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